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University of Utah Utah Nanofab College of Engineering | The University of Utah
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  • Utah Nanofab

Equipment Listing

Fabrication

View our plans for the equipment move schedule.

CategoryOwner
DepositionBrian Baker
EtchingCharles Fisher
FurnacesTony Olsen
LithographyBrian Baker
PackagingCharles Fisher
CMPBrian Baker
Test Measure InspectBrian Baker
Benches and HoodsCharles Fisher
Support EquipmentRyan Taylor

Micron Microscopy Core

CategoryOwner
AFM, Bruker Dimension IconBrian van Devener
Confocal Microscope, Olympus FV-1000Randy Polson
dbFIB, FEI Helios NanoLab 650Randy Polson
Desktop Sputterer, Denton Vacuum Desk VBrian van Devener
Ellipsometer, Woollam SpectroscopicBrian van Devener
Microscope, Polyvar METBrian van Devener
Optical Profiler, Zygo NewViewBrian van Devener
SEM, FEI Quanta 600 FEGBrian van Devener
SEM, Hitachi S-4800Krista Carlson
XPS, Kratos Axis Ultra DLDBrian van Devener
XRD, Bruker Discover D8Brian van Devener
XRF, Eagle III MicrospotBrian van Devener

Affiliated Labs

Didn't find the tools or instruments you were looking for? You might find what you need with some of our affiliated labs on campus.

 
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  • Utah Nanofab 36 S. Wasatch Drive, SMBB Rm 2500 Salt Lake City Utah 84112
  • Staff Phone: (801) 581-5676 Student Phone: (801) 585-5573 Fax: (801) 587-3077