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Utah Nanofab
:
Equipment
:
CMP
CMP
Allied M-Prep3 1
Allied M-Prep3 2
Allied M-Prep3 3
(chemical mechanical polishing)/planarization tool (Allied Hi-Tech)
Allied TECHPREP 10-1000
Strasbaugh 6EC
The University of Utah
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© 2013 University of Utah
Utah Nanofab
36 S. Wasatch Drive, SMBB Rm 2500
Salt Lake City Utah 84112
Staff Phone: (801) 581-5676 Student Phone: (801) 585-5573 Fax: (801) 587-3077