Deposition

ALD

Sputter

  • TMV Super

    SS-40C-IV Multi Cathode Sputtering system

    • Precious Metals: Pt, Au, Ir
    • Adhesion Layers: Ti, Cr, TiW

Evaporation

Parylene

PECVD

Evaporation Materials Available:

  • Al, Ag, Au, Au/Ge, Cr, Cu, Ge, In, Mo, NiCr, Nb, Ni, Ta, Ti, W, Zn

Chemical Vapor Deposition