LPCVD

• Canary 3 SiN

• Canary 4 Poly-Si
  • Gases: SiH₄, N₂, SiH₂Cl₂ , NH₃, H₂, O₂

Oxidation / Diffusion

• Canary 1 Oxidation

• Canary 2 Diff - Annl

• Diffusitron Mark IV 6 Stack
  • Wet/dry oxide, boron diffusion, phosphorous diffusion, annealing

Box

• Blue-M