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Utah Nanofab
College of Engineering | The University of Utah
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Utah Nanofab
:
Equipment
:
Lithography
Lithography
Pattern Generation
CAD Work Station
Heidelberg MicroPG 101
Spinners
APT Polos
CEE 100
CEE 200X Spinner
Headway EC101
Solitec 5100 LVT
Solitec 5110 CND
Aligners
Suss MA1006
EV 420
OAI 200 1
OAI 200 2
Vapor Prime
YES HMDS1
YES LP-III
Ovens
Binder FD53-UL
Blue-M 1
Blue-M 2
Blue-M 3
Blue-M 4
Hotplates
PR8 1
PR8 2
PR8 3
PR8 4
EMS 1000 1
EMS 1000 2
EMS 1000 3
Documentation
General Photolithography SOP:
Download in Microsoft Word Format
Download in PDF Format
The University of Utah
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© 2013 University of Utah
Utah Nanofab
36 S. Wasatch Drive, SMBB Rm 2500
Salt Lake City Utah 84112
Staff Phone: (801) 581-5676 Student Phone: (801) 585-5573 Fax: (801) 587-3077