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  • Utah Nanofab
  •  :  Equipment
  •  :  Lithography

Lithography

Pattern Generation

  • CAD Work Station
  • Heidelberg MicroPG 101

Spinners

  • APT Polos
  • CEE 100
  • CEE 200X Spinner
  • Headway EC101
  • Solitec 5100 LVT
  • Solitec 5110 CND

Aligners

  • Suss MA1006
  • EV 420
  • OAI 200 1
  • OAI 200 2

Vapor Prime

  • YES HMDS1
  • YES LP-III

Ovens

  • Binder FD53-UL
  • Blue-M 1
  • Blue-M 2
  • Blue-M 3
  • Blue-M 4

Hotplates

  • PR8 1
  • PR8 2
  • PR8 3
  • PR8 4
  • EMS 1000 1
  • EMS 1000 2
  • EMS 1000 3

 

Documentation

General Photolithography SOP:

Download in Microsoft Word Format Download in PDF Format

 

 
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