Metrology

• Profilometer Tencor P-10
  • submicron film thickness/surface roughness measurements

• Nanospec 3000
  • Film thickness monitor for oxide, nitride and polysilicon
    

• Profilometer Tencor P-20H

• Film Stress Tencor FLX-2320

• 4-point Probe Microtech RF-1

• Gaertner Ellipsometer

• UTI Wirebond Pull Tester

• Mitutoyo Dial Indicator Probe (1 um resolution)

• N and K 1500 Analyzer

Microscopes

• Nikon Optiphot 1

• Nikon Optiphot 2

• Olympus MX51

• Nikon V12A

Device Electrical Characterization

• Keithley CV System

• Keithley 4200 SCS

Diagnostic Tools

• RGA Spectra Vac-Check

• Leak Detector Alcatel ASM 180

• Pirani Gauge

• UV Intensity Meter OAI 357

• UV Intensity Meter OAI 306

• Oscilloscope Tektronix TDS 2002 B