Denton Discovery 18
- 3 target capability, 2 rf sources, substrate rotation and heat
- Sputter Targets Available
- Metals: Al, Au, Cr, Co, Cu, In, Ni, Pt, Si, Ta, Ti, W
- Alloys: Alumel (Ni 95: Al+Mn+Si 5), Chromel (Ni 90: Cr 10), CuAg 99:1, NiCr 80:20, TiW 10:90
- Misc.: Ag-filled conductive elastomer, Boron Nitride, ITO, Si, SiC, SiO2, Si3N4, YSZ
Process Information
Location
Files
SOP:
Denton Discovery 18 SOP
Equipment Status
√ Tool is Up
Reservations Calendar
Download iCal for Reservation Calendar Log In
Log in for more information.