FIB, FEI Quanta 3D

The Quanta dbFIB combines a high resolution scanning electron microscope (SEM) with a focused ion beam (FIB) together in one instrument; allowing users to mill/cross section their samples and image the results.

The deposition processes result in patterned films of non-crystalline platinum.Deposition/milling of various shapes includes: lines, boxes, polygons etc.BMP files can be directly imported for 3D milling. We do not yet have the Omniprobe option, which allows lift out of samples prepared for TEM analysis, though the cuts can be made.

For SEM anlaysis, samples can be imaged under high vacuum, low vacuum and ESEM conditions. Furthermore, theelectron beam can be used to compensate for charging when milling non-conductive samples.

Instrument Status:
UP


Future Capabilities

This instrument is available on an extended evaluation, thanks to Prof. Florian Solzbacher and the USTAR packaging cluster. Planned upgrades pending funding include: TEM automated sample prep, TEOS (oxide) and W-dep, and accelerated etching of organic materials and XeF2 for enhanced etching of other materials, including silicon.
The instrument will also be upgraded to include secondary ionimaging mode, which gives strong materials contrast analogous (and complementary to) BSE imaging in SEM; but the ionmicroscopy mode is extremely surface sensitive at the 2-3 monolayer scale.

Additionally, this mode is very useful for channeling contrast, providing qualitative grain texture information. The image on the left (courtesy: Dr. Ian Harvey) was taken using this mode, to examine a 2 micron thin film of sputtered/annealed Al + 2%Cu. The lighter grains indicate closer relative orientation of the narrowest lattice spacing presented parallel to the incoming beam. Darker grains mean deeper beam penetration, and hence fewer escapingions to form an imaging signal. It is also easy to see the (light) Cu precipitates at the grain boundaries.


[50 micron field of view]

  • For appointments on the FIB/SEM with operator assistance contact:
    • Prof. Ian Harvey - irharvey at eng dot utah dot edu
    • Dr. Brian Van Devener-bvandev atchem dot utah dotedu
    • Alex Hogan - alexhogan88 atyahoo dot com
    • Kathryn Ecsedy - kathryn dot ecsedy at utah dot edu

Technician Availability
Summer 2010
Monday Tuesday Wednesday Thursday Friday
7:00
7:30
8:00 Brian** Brian** Brian** Brian** Brian**
8:30 Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian**
9:00 Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian**
9:30 Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian**
10:00 Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian**
10:30 Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian**
11:00 Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian**
11:30 Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian**
12:00 Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian**
12:30 Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian**
1:00 Brian** Brian** Brian** Brian** Brian**
1:30 Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian**
2:00 Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian**
2:30 Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian**
3:00 Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian**
3:30 Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian**
4:00 Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian**
4:30 Kathryn/Brian** Kathryn/Brian** Kathryn/Brian** Kathryn/Brian**
5:00 Kathryn Kathryn
5:30
6:00


Last Updated: August 4, 2010

Equipment Status

√ Tool is Up

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