• Utah Nanofab
•  :  Equipment
•  :  Remediation
•  :  Guardian Burn Box

Guardian Burn Box

 

Tool Info:  Burns off toxic exhaust gases.

For Use With:

• Canary LPCVD Furnaces
• LAM
• Oxford 100
• Oxford 80+

                

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Files

SOP:

Burn Box SOP

Equipment Status

√ Tool is Up

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