Lam 590 Poly
The Lam1 is a dedicated polisilicon etch system.
Process Information
Location
Equipment Status
| Reported | Type of Issue | Definition | Details |
|---|---|---|---|
| 2012-06-27 08:26:19 | Shutdown | N2 leak in GRC | No Message |
The Lam1 is a dedicated polisilicon etch system.
| Reported | Type of Issue | Definition | Details |
|---|---|---|---|
| 2012-06-27 08:26:19 | Shutdown | N2 leak in GRC | No Message |