Optical Profiler, Zygo NewView

Acquired through University Vice-President support in conjunction with a major contribution from the Zygo Corporation, this instrument quantitatively measures surface topography of a sample using white light optical interference. This yields a non-contact and very rapid method to acquire 3-D surface data over the field-of-view for the objective lens used. Common applications include surface roughness quantification, MEMS inspection, MEMS device characterization, and etch inspection.

 

 

  

 

Instrument Capabilities

Objectives

  • Installed Objectives: 5 and20
  • Range of Possible Objectives: 1,2, 5, 10, 20, 50, 100
  • Long working distance objectives are available for many magnifications
  • Working Distance: 4.7 mm

Togographical Measurement Range

  • 150 m vertical range with Angstrom resolution (faster)
  • 5 mm vertical range with nm resolution (slower)
  • Lateral Resolution: 0.88 m
  • 20(Field-of-View: 350260 m2)

Sample Stage

  • Automated sample stage
  • Automated field stiching (links arrays of multiple images)
  • Sample translation 6" total in X and Y
  • Tip/Tilt 8 total in Tip and Tilt

Software

  • MetroPro 8.1.5
  • Analysis applications for surface roughness, step height, dimensional analysis, etc
  • Offline version of software available to lab users

 

Downloads

Last Updated: June 30, 2010

Location

Files

SOP:

Zygo NewView SOP in PDF Format

Equipment Status

√ Tool is Up

Reservations Calendar

Download iCal for Reservation Calendar

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