Solitec 5100 LVT

  • Provides spin processing of single wafers/substrates of up to 225mm diagonal
  • Tools for loading and centering for:
    • 4 inch (100 mm) substrate
    • 2 inch (50 mm) substrate

Training Video

Watch the training video online.

Location

Files

SOP:

Photolithography SOP

Equipment Status

√ Tool is Up

Reservations Calendar

Download iCal for Reservation Calendar

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