Suss MA1006
- Top and Bottom Side alignment
- One can expose in all common printing modes using collimated light optics
- Can be used in all major lithography areas:
- M(O)EMS
- Bulk MEMS
- Optoelectronics with more coarse features
- Power devices
- Bumping
- Etc.
- Equipped with a programmable control unit
- Alignment is carried out by means of micro-meter screws
- Fitted with a calotte chuck wedge error compensation system
- Top side alignment
- Equipped with a splitfield microscope
- CCD and monitor
- Supports 5" and 7" masks
Files
SOP:
Suss MA1006 Aligner SOP
Equipment Status
√ Tool is Up
Reservations Calendar
Download iCal for Reservation Calendar Log In
Log in for more information.