Utah Nanofab : Equipment Status Report : <!--__FUEL_MARKER_

Equipment Status Report

Equipment Name	Equipment Status
dbFIB, FEI Helios NanoLab 650	Problem
Cambridge Fiji F200	Problem
AFM, Bruker Dimension Icon	Up
Microscope, Polyvar MET	Up
Optical Profiler, Zygo NewView	Up
XRF, Eagle III Microspot	Up
Disco DAD3220	Up
Perkin-Elmer 4400	Up
SEM, FEI Quanta 600 FEG	Up
XPS, Kratos Axis Ultra DLD	Up
Ellipsometer, Woollam Spectroscopic	Up
Film Stress Tencor FLX-2320	Up
Nanospec 3000	Up
Profilometer Tencor P-20H	Up
SCS PDS 2010	Up
Oxford Plasmalab 80	Up
Allied M-Prep3 1	Up
Allied M-Prep3 2	Up
Allied M-Prep3 3	Up
Allied TECHPREP 10-1000	Up
Denton SJ20C	Up
Heidelberg MicroPG 101	Up
Oxford 100 ICP	Up
Solitec 5100 LVT	Up
Solitec 5110 CND	Up
Strasbaugh 6EC	Up
Suss MA1006	Up
TMV Super	Up
XACTIX X2 XeF2	Up
YES HMDS1	Up
Allied Techcut4	Up
Denton Discovery 18	Up
Disco DAD641	Up
EV 420	Up
EVG 520 IS	Up
Laser Mark 4000 Nd-YAG	Up
MEI Wedge	Up
Optec Micromaster KrF	Up
Canary 1 Oxidation	Up
Canary 2 Diff - Annl	Up
Canary 3 SiN	Up
Canary 4 Poly-Si	Up
Lam 590 Poly	Up
Lam 590 SiO2/SiN	Down
4-point Probe Microtech RF-1	Up
Acid Neutralization	Up
APT Polos	Up
Binder FD53-UL	Up
Blue-M	Up
Blue-M 1	Up
Blue-M 2	Up
Blue-M 3	Up
Blue-M 4	Up
Bold sn1974 Etch	Up
Bold sn1975 Etch	Up
Bold sn1976 Litho	Up
Bold Vent Deck SS	Up
CAD Work Station	Up
CDA	Up
CEE 100	Up
CEE 200X Spinner	Up
CHA SEL600	Up
Computer Work Stations	Up
Confocal Microscope, Olympus Fluoview FV10i	Up
Confocal Microscope, Olympus FV-1000	Up
Confocal Microscope, Olympus IX81	Up
Confocal Microscope, Olympus MultiPhoton	Up
Coral	Up
dbFIB, FEI Quanta 3D-FEG	Up
Desktop Sputterer, Denton Vacuum Desk V	Up
Diffusitron Mark IV 6 Stack	Up
DI Water	Up
Door Access	Up
Edwards GRC 1	Up
Edwards GRC 2	Up
Electromask CC250	Up
Ellipsometer Woollam VASE	Up
EMS 1000 1	Up
EMS 1000 2	Up
EMS 1000 3	Up
Exhaust	Up
Expertech CTR-125 Doped Poly	Up
Expertech CTR-125 LTO	Up
Expertech CTR-125 SiN	Up
Expertech CTR-125 TEOS	Up
Eye Wash stations	Up
FIB, FEI Quanta 3D	Up
Fume Hood 1	Up
Fume Hood 2	Up
Gaertner Ellipsometer	Up
Guardian Burn Box	Up
Headway EC101	Up
House N2	Up
House Vacuum	Up
HP 4145A	Up
HVAC	Up
Keithley 4200 SCS	Up
Keithley CV System	Up
KOH	Up
Leak Detector Alcatel ASM 180	Up
Lighting	Up
Lindberg Metal	Up
Lindberg Metal Oxide	Up
Lindberg Miscellaneous	Up
Mitutoyo Dial Indicator Probe	Up
MST Hazardous Gas Monitoring	Up
N and K 1500 Analyzer	Up
Nikon Optiphot 1	Up
Nikon Optiphot 2	Up
Nikon V12A	Up
OAI 200 1	Up
OAI 200 2	Up
Olympus MX51	Up
Oscilloscope Tektronix TDS 2002 B	Up
Oxford Plasmalab 80 PECVD	Up
Pirani Gauge	Up
PR8 1	Up
PR8 2	Up
PR8 3	Up
PR8 4	Up
Process Cooling	Up
Profilometer Tencor P-10	Up
Profilometer, Tencor P20	Up
RGA Spectra Vac-Check	Up
SEM, Hitachi S-4800	Up
Semitool ST-260	Up
Semitool ST-870	Up
Showers	Up
SiC Chamber	Up
Solvent Hood 1	Up
Solvent Hood 2	Up
Strasbaugh	Up
Technics PE II-A	Up
UTI Wirebond Pull Tester	Up
UV Intensity Meter OAI 306	Up
UV Intensity Meter OAI 357	Up
UV Tape Release UVM-102W	Up
Wifi	Up
XRD, Bruker Discover D8	Up
YES LP-III	Up