Process Information
Process Design Spreadsheet
The nanofab process design spreadsheet allows you to analyze and predict process performance. Download the spreadsheet now to experiment with it yourself.
Process Design Web Application
We are currently converting the process design spreadsheet to a web application. You can find the beta version of that application here.
Photolithography Procedures
Shipley 1813 Positive Photoresist
AZ 9260 Thick Positive Photoresist Spec Sheet 1
AZ 9260 Thick Positive Photoresist Spec Sheet 2
Positive Lift Off Resist LOR10B Spec Sheet 1
Positive Lift Off Resist LOR10B Spec Sheet 2
Negative Lift Off Resist AZ NLOF 2020 Spec Sheet
Sputter Deposition
Denton Sputter Characterization Aug 2011
Denton Sputter Rates and Process Parameters
LPCVD
Low-Stress Silicon Nitride Log Sheet Parameters
Reactive Ion Etch
Oxford 80+ Characterization Results Summer 2010 Etch Rates and Process Parameters
Oxford 100 DRIE SF6/C4F8 Log Sheet
Oxford 100 Material Etch Rates Aug 2011
Cross Section Pictures of Results: High Aspect Ratio No Undercut
Lam 490 Nitride Etcher
Nitride Etching Process Characterization Report