ME EN 2960 Foundations of Microsystems
This is a special topics class. Check with Undergraduate Advising Office each semester to obtain correct class number for enrollment. Optional Class-Not Required for Degree-Foundations of Microsystems will provide a "hands-on" introduction to the world of micro and nanosystems for target students in mechanical, electrical, chemical, bioengineering, and other areas. The course is a sequence of lectures and laboratory sessions that will allow beginning engineering students to understand the wealth of existing applications and future inventive possibilities made possible at the micrometer and nanometer scale.
ECE 5202 Integrated Circuit Microfabrication
Prerequisites: ECE 3200 Corequisites: ECE 5201
Fundamentals of integrated circuit fabrication, basic understanding of IC processes and the effect of processing choices on device performance. Students learn to use process simulation tools and also fabricate and characterize devices in the laboratory. Processing techniques and design methodologies of microfabrication will be covered. Process modules will be discussed: lithography, thermal oxidation, diffusion, ion implantation, etching, thin-film deposition, epitaxy, and metalization. Process simulation and layout design rules aimed toward the fabrication of Metaloxide-Semiconductor MOS devices and process integration will also be covered. The laboratory part of the course will provide hands-on experience to fabricate and characterize a CMOS chip.
ECE 5221 Fundamentals of Micromachining Processes
Cross listed as ME EN 5050.
Prerequisites: Instructor's Consent
Meets with ME EN 6050, ECE 6221, BIOEN 6421, MSE 6421. Introduction to the principles of micromachining technologies. Topics include photolithography, silicon etching, thin film deposition and etching, electroplating, polymer micromachining, and bonding techniques. A weekly lab and a review of micromachining applications is included. Undergraduate students only.
ECE 5961 Practical Scanning Electron Microscopy
Cross listed with PHYS 5739 and MetE 7910
Students learn multiple advanced microscopy applications using state-of-the art imaging tools and analytical peripherals (EDS, EBSD, XRF).
ECE 5962 Thin Film Deposition
Science and technology of thin film deposition and characterization. Topics include characterization techniques used for measuring thin film properties, physical vapor deposition (PVD), and chemical vapor deposition (CVD). Application of deposition hardware, substrate preparation, and vacuum science and technology.
ECE 6225 Microsystems Design and Characterization
Cross listed as MET E 6055, BIOEN 6423, MSE 6055, ME EN 6055, CH EN 6659.
Prerequisites: Graduate Status OR Instructor Consent
Meets with ME EN 5055, ECE 5225, MET E 5055, MSE 5055, CH EN 5659. Third in a 3-course series on Microsystems Engineering. This course generalizes microsystems design considerations with practical emphasis on MEMS and IC characterization/physical analysis. Two lectures, one lab per week, plus 1/2 hour lab lecture. Must also register for ME EN 6056 (0-credit lab with fees). Graduate students only. Extra work required.
ECE 6231 Microsensors
Cross listed as ECE 7231. Prerequisites: ECE 5221 OR ECE 6221
The course builds on ECE 5221/6221, Fundamentals of Micromachining. Topics include definitions, categorization and application fields of microsensors and actuators, an introduction to solid state physics, piezoresistive sensors, semiconductor-based temperature sensors, magnetoresistive sensors, thermoelectric sensors, photoelectric sensors, micro gas and fluid concentration sensors, molecular diagnostics arrays, and various actuators (relays, micromotors, inkjet printheads, micropumps), sensor packaging and assembly. Registration for a weekly lab (1) is required. Extra work required of graduate students.
ECE 6440 Integrated Optics and Optical Sensors
Prerequisites: ECE 5410 AND ECE 5411
Planar and rectangular waveguides and their mode properties. Fabrication techniques, input and output couplers, and coupling between guides. Integrated optic modulators. Applications of integrated optical devices. Optical sensors for biomedical and environmental monitoring. Includes two laboratory experiences.
ECE 6960 Micro Actuators
Prerequisites: Department Approval AND Graduate Status in Electrical and Computer Engineering
Cross listed as BIOEN 6900, ECE 7960, ME EN 6960, ME EN 7960
ECE 6962 Heterogeneous Microsytems Technologies
A student project course, in which students research or invent microscale devices and then design, simulate, fabricate, and characterize devices.
ECE 7960 Surface Chemistry & Analysis
Cross listed as CHEM 7780 and MET E 7910
Introduction to physics and chemistry of solid surfaces. The lab section of the course is designed to provide a working knowledge for the operation of the Kratos Axis Ultra XPS/AES/ISS surface analysis system.