Equipment Move Schedule Update

January 26, 2015

We are on the home stretch of the equipment move into the SMBB Nanofab. Thus, there are some critical equipment move/installation plans that we need to make you aware of.

EQUIPMENT MOVE INFORMATION AND SCHEDULE

TMV Sputter System

  • March 10, 2015: Last day to use the TMV for six weeks (precious metal targets will be available for use in the Denton sputter system during this time period)
  • March 11-24: Uninstall, dismantle and move the TMV to SMBB
  • March 24-April 19: Replace water manifold and connect the TMV to facilities
  • April 20 (approx): TMV available for use in SMBB

Gold Etch

  • Feb 1-March 30, 2015: Modify wet bench in SMBB to accommodate gold etch
  • April 1, 2015: Begin using gold etch in SMBB (may still be used in MEB fab until this date)

Electroplating

  • April 1, 2015: Begin using electroplating in SMBB dicing saw room (may still be used in MEB fab until this date)
  • We have applied for RIF funding for an electroplating station with nickel and copper baths.

NEW EQUIPMENT INSTALLATION SCHEDULE

New Heidelberg MicroPG (with 0.9 um write capability)

  • Available for use beginning today: The new Heidelberg is up and running. Please see staff for training to become qualified to use the tool.

LPCVD furnace stack: TEOS, LTO, doped Poly, Silicon Nitride

  • Feb 1-Feb 28: Visits from field applications engineer to start up baseline processes
  • March 1-31: Characterization runs and process development bringing processes on line in sequence

RTP Rapid Thermal Processing Furnace: N2, O2, Forming Gas up to 1200 C

  • Feb 1: Shipping
  • Feb 10-March 31: Installation and characterization
  • April 1 (approx): Available for use

Wet/Dry Oxidation Furnace Stack in SMBB

  • Feb 1-April 30: Installation and testing
  • April 1 (approx): Available for use

Electrical Characterization Lab (ECL) (room 2115 SMBB)

Tools currently available for use (please see Tony Olsen for access):

  • MSOS404A High speed mixed-signal oscilloscope: 4 GHz, 4 Analog plus 16 Digital Channels
  • Keithley 4200 SCS
  • CV Meter
  • Wentworth probe station
  • We have applied for RIF funding of a Keysight E5061B network analyzer

Please let us know if you have any questions or concerns at nanofab-support@eng.utah.edu.