HSC Cost Adjustment Request

If you think that there is an error with your reservation block and/or charges, please, tell us about it. Fill out this form and we will look into it as soon as possible.

HSC Cost Adjustment

Date and Time

Your Name *

Your Email Address *

Was the tool locked when you first arrived (grey screenlock, unpowered screens or controllers)

Yes

Were you able to successfully re-lock the tool?

Yes

Tool Category

Tool Name and Owner (deposition)

Tool Name and Owner (etchers)

Tool Name and Owner (furnaces)

Tool Name and Owner (lasers)

Tool Name and Owner (lithography)

Tool Name and Owner (measurement)

Tool Name and Owner (microfluidics)

Tool Name and Owner (microscopy)

Tool Name and Owner (packaging)

Tool Name and Owner (patter generators)

Tool Name and Owner (test and electrical characterization)

Tool Owner Email

Description of problem

Please be as specific as possible. Tell us why you don't think the system was working as intended. Provide critical information and give context.

Screenshot

Maximum file size: 419.43MB

Please upload a picture of the error that you received on your screen.

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Photolithography Spin/Bake/Expose/Develop

+S1813 Photoresist

nLOF 2020 Photoresist

LOR 10B Photoresist

AZ 9260 Photoresist

A Student

A Business

Interested in Nanotech

Preparing to Publish

Utah Nanofab