Target Depth Not Reached

Symptoms

  • The written depth is too shallow even when the depth feedback sets the electrostatic force voltage to the maximum possible value.
  • The top and right hand edges of the patterned areas are deeper than the rest of the written area.
trbl_cold_tip

Figure 31 Right and top margin of shapes patterned deeper. Target depth not reached. These are the symptoms of a too cold tip.

Cause

The tip is too cold to evaporate the PPA correctly.

Solution

Increase the writer temperature/voltage to improve the patterning.