CLL Runtime¶
The CLL runtime panel (Figure 76) provides functionality to perform Closed Loop Lithography (CLL) using the NanoFrazor.
Open the CLL runtime panel
CLL Runtime Tab¶
Session Mode: Read-Only or Write-Read
The session mode can be changed only in the floorplan panel.
Write Parameters
Forward Height (nm): Nominal height for writing
Writer Voltage (V): Voltage applied to the writer during writing
Force Pulse (µs): Force voltage apply duration between the sample and the cantilever for each write pixel
Enable Pulsed Heating: Figure 77 shows the difference between the pulsed and the non-pulsed heating write modes
In the pulsed heating mode, the writer is heated only for a fraction of the write pixel duration. This allows setting higher writer temperatures without burning the resistor. In the non-pulsed mode, the writer remains heated for the entire duration of the write line.
Heat Pulse (µs): Writer heat duration in the pulsed heating mode for each write pixel
Pre-tension Force (V): Force voltage applied between the sample and the cantilever to pre-bend the cantilever while writing
Write force voltages set in the CLL Forces panel add on to the pre-tension force voltage.
Cantilever pre-bending is currently implemented only during pulsed heating mode.
Pre-tension Off (µs): Pre-tension force release duration to ensure tip snaps off from the sample after writing
Read Parameters
Read Force (V): Force applied between the sample and the cantilever during reading to ensure that the tip remains in contact with the sample
Forward Height (nm): Nominal height for reading in the forward direction
Forward heights for writing and reading are equal when the CLL mode is Write-Read.Backward Height (nm): Nominal height for reading in the backward direction
Set to 0 during normal operation so that the tip is in contact with the sample.
CLL Offsets Tab¶
The CLL offsets tab (Figure 78) provides functionality to compensate for the thermal expansion and electronics delays by manually adjusting the shift between the write and read fields.
CLL Write Offsets
XW (nm): Write offset along the field X-axis
YW (nm): Write offset along the field Y-axis
Display Attributes: Parameters to higlight and precisely align relevant features of the fields