Introduction

NFE

Figure 1 NanoFrazor Explore

The NanoFrazor Explore is a nanofabrication tool with integrated in-situ metrology for rapid prototyping. It is a maskless lithography system able to create high-quality 3D nanostructures with sub 20 nm resolution.

The NanoFrazor is based on Thermal Scanning Probe Lithography. It uses an ultra-sharp tip to evaporate a thermally sensitive resist. It incorporates all the key features of Thermal Scanning Probe Lithography including high resolution 3D patterning of nanostructures and simultaneous in-situ metrology. The technology is compatible with standard pattern transfer processes like reactive-ion etching, electroplating and lift-off. The tool has a wide range of applications in the fields of nanophotonics, nanooptics, nanomagnetism, nanoelectronics, plasmonics, etc.

This manual provides an overview on the NanoFrazor.

Getting Started

  1. Carefully read the Safety Instructions.
  2. Prepare a sample using one of the recipes contained in Processes.
  3. Follow the steps outlined in the Quick Start guide.

Further Details

An extensive description of the NanoFrazor operation is given in the Technology Reference section.

Description of the NanoFrazor hardware is given in the Hardware Reference section.

Instructions for the software installation and a detailed description of the NanoFrazor user interface and scripting language are given in the Software Reference section and in the Scripting section.

Various work flows for the definition and transfer of high resolution 2D and 3D nanostructures using the NanoFrazor are provided in Processes.

Disclaimer: All information given in this manual is reliable to our best knowledge. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications and external appearance are subject to change without notice. Questions asked to SwissLitho support and their answers might be incorporated in the user manual if of general interest, except if explicitly marked confidential.