Sample¶
The sample panel (Figure 57) provides functionality to describe the sample for logging purposes.
Open the sample panel
Sample Tab¶
Sample Id: Unique identifier of the sample (e.g. from the user’s samples database)
Substrate Type: Silicon or Other
Resist Type: PPA, Molecular Glass or Other
Resist Thickness (nm): Thickness of the resist
Stage Position (Z-Axis)
Move along the Z-axis in the negative direction
Move along the Z-axis in the positive direction
dZ (µm): Step size along the Z-axis
API Functions¶
See: NFAPI Sample