Set up the System

This section shows how to set up the NanoFrazor system for a lithography session.

Start up the System

  • igor Start Igor Pro from the Windows Task-bar.
  • In Igor, from menu Macros select Load NanoFrazor Package.
  • A new menu (NanoFrazor), will appear. From it, select Initialization.
  • From the same NanoFrazor menu, select Main Panel. The main panel will open.
  • Still from the same NanoFrazor menu, select Microscope Viewer. This opens the optical microscope viewer.
  • You can now arrange the windows, e.g., Main Panel on the left, Microscope Viewer on the right.
windows_arrangement

Figure 3 Example of windows arrangement

More Details: See: Getting Started

Replace Cantilever

Load the Sample

  • From the Stage Position (Z Axis) box move the stage up by 3 mm (for this, you can set the Z step size to 1,000 µm).
  • Open the NFE front door and the environmental chamber to access the NanoFrazor mechanics.
  • Load your sample on the ITO coated sample holder (see Figure 4a).
  • Navigate on the sample until the area where you want to start patterning is located roughly below the NanoFrazor tip.
  • Make sure that the optical microscope is focused on the substrate surface. If necessary, adjust the optical microscope focus using the focus knob (see Figure 4b).
  • Close the environmental chamber and the NFE door.
load_sample_focus_microscope

Figure 4 (a) Substrate, in orange, on the sample holder. (b) Optical microscope focusing wheel, highlighted in orange.