Divergence of the patterned depth¶
Symptoms¶
- Patterned depth diverging from target depth.
- Force vs target depth curve with strong oscillations.
Cause¶
These are typical symptoms of incorrect Write-Read Alignment and/or too thin Feedback Mask.
Solution¶
Compensate the shift (CLL Offsets Tab) and/or adjust the feedback mask (Depth Feedback Mask Tab).