NanoFrazor
Introduction
Safety Instructions
Quick Start
Set up the System
Configure the System
Define Layout
Perform Lithography
Technology Reference
Operations
Surface Approach
Temperature Calibration
Reading
Writing
Write-Read Alignment
Depth Feedback
Cookbook
3D Patterning
High Resolution Patterning
Overlay
Troubleshooting
Jumps in Measured Depth
Target Depth Not Reached
Divergence of the patterned depth
Big Hole
Hardware Reference
Housing
Working Compartment
Storage Compartment
Electronics Compartment
Gas Compartment
Installation
Cantilever Replacement
Software Reference
Getting Started
Graph Tools
Configuration
Sample
Cantilever
Piezo Approach
IV Curve
Cantilever Sensors
Layout Editor
Image Import
GDS Import
Layout
Session
Floorplan
CLL Runtime
Trajectory
Level Plane
CLL Forces
Utilities
Logs
Lights
Valves
Environment
Microscope
Stage
Electronics
USB
Settings
Scripting
Getting Started
MAO Framework
API Functions
Script Examples
Tutorial: Analysis of a script
Tutorial: Development of a script
Processes
PPA handling
Simple lift-off for > 20 nm resolution
3D etch into silicon
High Resolution Processes
Changelog
Contact Us
NanoFrazor
Docs
»
Software Reference
Software Reference
ΒΆ
The NanoFrazor software provides a fully integrated platform for operating the NanoFrazor Explore.
Getting Started
Graph Tools
Configuration
Sample
Cantilever
Piezo Approach
IV Curve
Cantilever Sensors
Layout Editor
Image Import
GDS Import
Layout
Session
Floorplan
CLL Runtime
Trajectory
Level Plane
CLL Forces
Utilities
Logs
Lights
Valves
Environment
Microscope
Stage
Electronics
USB
Settings