Perform Lithography

This section shows how to pattern the desired layout into the resist.

  • Select Session from the top menu of the Main Panel.

Set up a Session

  • flp Select Floorplan from the menu on the left.
  • From the Floorplan tab select Session Mode: Write-Read.
  • Choose as Layout Reference Field the field you want the NanoFrazor to write.

Tip

In most cases the default values in the Floorplan tab and Scan Plan tab yield good results and do not need to be changed.

More Details: See Floorplan.

Patterning

  • cll Select Run-time from the left menu bar.
  • perform48 Perform the Run-time. The selected field will be written in the resist.

More Details: See: CLL Forces and CLL Runtime.