Set up the System¶
This section shows how to set up the NanoFrazor system for a lithography session.
Start up the System¶
Start Igor Pro from the Windows Task-bar.
- In Igor, from menu Macros select Load NanoFrazor Package.
- A new menu (NanoFrazor), will appear. From it, select Initialization.
- From the same NanoFrazor menu, select Main Panel. The main panel will open.
- Still from the same NanoFrazor menu, select Microscope Viewer. This opens the optical microscope viewer.
- You can now arrange the windows, e.g., Main Panel on the left, Microscope Viewer on the right.
More Details: See: Getting Started
Replace Cantilever¶
- The NanoFrazor cantilevers are consumables. If necessary replace the cantilever following the cantilever replacement instructions.
Load the Sample¶
- From the Stage Position (Z Axis) box move the stage up by 3 mm (for this, you can set the Z step size to 1,000 µm).
- Open the NFE front door and the environmental chamber to access the NanoFrazor mechanics.
- Load your sample on the ITO coated sample holder (see Figure 4a).
- Navigate on the sample until the area where you want to start patterning is located roughly below the NanoFrazor tip.
- Make sure that the optical microscope is focused on the substrate surface. If necessary, adjust the optical microscope focus using the focus knob (see Figure 4b).
- Close the environmental chamber and the NFE door.