CLL Runtime

The CLL runtime panel (Figure 76) provides functionality to perform Closed Loop Lithography (CLL) using the NanoFrazor.

cll Open the CLL runtime panel

CLL Runtime Tab

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Figure 76 CLL Runtime Tab

Session Mode: Read-Only or Write-Read

The session mode can be changed only in the floorplan panel.

Write Parameters

Forward Height (nm): Nominal height for writing

Writer Voltage (V): Voltage applied to the writer during writing

Force Pulse (µs): Force voltage apply duration between the sample and the cantilever for each write pixel

Enable Pulsed Heating: Figure 77 shows the difference between the pulsed and the non-pulsed heating write modes

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Figure 77 Pulsed Vs Non Pulsed Heating

In the pulsed heating mode, the writer is heated only for a fraction of the write pixel duration. This allows setting higher writer temperatures without burning the resistor. In the non-pulsed mode, the writer remains heated for the entire duration of the write line.

Heat Pulse (µs): Writer heat duration in the pulsed heating mode for each write pixel

Pre-tension Force (V): Force voltage applied between the sample and the cantilever to pre-bend the cantilever while writing

Write force voltages set in the CLL Forces panel add on to the pre-tension force voltage.

Cantilever pre-bending is currently implemented only during pulsed heating mode.

Pre-tension Off (µs): Pre-tension force release duration to ensure tip snaps off from the sample after writing

Read Parameters

Read Force (V): Force applied between the sample and the cantilever during reading to ensure that the tip remains in contact with the sample

Forward Height (nm): Nominal height for reading in the forward direction

Forward heights for writing and reading are equal when the CLL mode is Write-Read.

Backward Height (nm): Nominal height for reading in the backward direction

Set to 0 during normal operation so that the tip is in contact with the sample.

CLL Offsets Tab

The CLL offsets tab (Figure 78) provides functionality to compensate for the thermal expansion and electronics delays by manually adjusting the shift between the write and read fields.

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Figure 78 CLL Offsets Tab

CLL Write Offsets

XW (nm): Write offset along the field X-axis

YW (nm): Write offset along the field Y-axis

Display Attributes: Parameters to higlight and precisely align relevant features of the fields

Read Field Min (%): Minimum of the displayed depth range (Figure 79)

Read Field Max (%): Maximum of the displayed depth range (Figure 79)

Write Field Opacity (%): Opacity of the write field

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Figure 79 Read Field Display Attributes