Sample

The sample panel (Figure 57) provides functionality to describe the sample for logging purposes.

smp Open the sample panel

Sample Tab

nf_smp_panel_tab0

Figure 57 Sample Tab

Sample Id: Unique identifier of the sample (e.g. from the user’s samples database)

Substrate Type: Silicon or Other

Resist Type: PPA, Molecular Glass or Other

Resist Thickness (nm): Thickness of the resist

Stage Position (Z-Axis)

move_z_neg Move along the Z-axis in the negative direction

move_z_pos Move along the Z-axis in the positive direction

dZ (µm): Step size along the Z-axis

API Functions

See: NFAPI Sample