I have access code here, can you try calling again?


Still goes to a mailbox: voicemail box that's not set up yet.

Think you can give me a call? 310 938 6815voice mail for you now?


Sorry, try again? I just tried your number just a second ago

Ok, yeah, having trouble hearing you too. If you have a question, just type it in here.

First:

The menu needs to be adjusted so that the advance menu can be used. To do this:

1) Go to C:/HIMT/Exposure Wizard/System

2) Find the file: upg.cfg

3) Change the menu entry 

MODE = 1

to 

MODE = 2

This will let you start up as advanced.

When the menu starts, the Password is DWL100

With me so far?

Ok, cool. 

Quick note: Make sure that you ONLY change the Mode value. Changing anything else will cause major problems with the machine. 


Ok, Next: 

You can see that the machine starts up as normal in the advance mode. Once hardware is initialized, we'll start the APP, which is located on the upper menu bar.



See?

yes


Now, we have the script editor available, and the actual system control panel. First, we start by loading a wafer.

Note the "To Unload" button. The stage should be out in the unload position now. can you see that?

yes, loading

Once you've loaded and closed the door, feel free to press the "To Center" button.


Next, we focus the writehead.

And the plate is physically set for writing. 

Now, we need to set up the actual job, and that's where the script editor comes into play:

This part can be a little complex, especially over text, so if I go to fast, feel free to interrupt me.

First, we select the design, using the design window. 
I assume we're using the standard PFM.cif?

no, we can load onto c:
ok
What's the design called? It might not be on the current list, since these are designs are generally installed by connecting directly to the linux box inside the upg. 

Give me a quick moment. sure

Ok, just checked: adding your design to the app list is a long and difficult process that'll require us to connect direcly to the linux computer in the UPG.

Instead, we can test with the design "Square2500" and just write with an energy that takes us halfway through the resist. (Do you know what that energy value might be?)

4 mW 80%

ok, perfect.

Next part of setup: Do you know how far along the scanscale you'd like to test, and at what stepsize?

2.075MHz, to 2.125MHz, with step of 0.001MHz


Ok, first, let's set the energy:

Next, the scan scale itself: note that the white boxes are starting values, while the blue ones are step sizes.
And only 1 blue box can be active at a time.

Then, we need to figure out how many fields it will take to get to 2.125, and write that many fields. 

Wow, 150 fields?

50

erm. sorry, yeah.

Ok, we'll do a 10x5 matrix, then.

See?

yes


Next, it's best to set a starting position, How big is the sample?3" x3"


Ok, i"m going to load the design real quick, and check the size.
See how the x/y increments changed?
yes


Ok, so we can go ahead and move the design a little to the left, since we can see how it'll fit. 10 designs should be something like a centimeter or so.oK?

Now that our parameters are set up, we can create the actual script with the create button. Once we're happy with the script, we can use: Add to Script

Note how it's all there.

Finally, we can hit "Run Batch" to execute it. 


Any questions so far?

clear

Once you have the scan scale value, you need to connect to the Linux computer in the UPG to change it.

Open teraterm, and connect. The username and password are both upg101

Then, you emacs the file dwl.cfg located in the sys director: There, you can see the scanscale value.
Make sure you ONLY change that. 
Any other questions?
will we be able to load pengs file?
Not as a test pattern using the app. I'll need to talk to christian for the details using the app.

we can run his file in normal mode then.
Yeah, in normal mode there shouldn't be an issue. Just remember to go to the cfg file and change mode =1.

If you have any more questions or anything comes up, or if you need me to change the dwl.cfg later on, feel free to contact me at my number that I gave you above, or email.

So, everything ok?

yes, please let us know if we can have a file loaded into proper location for future test.

Will do, we will probably need to have another teamviewer session for that at some point.

ok

Have a nice day, gentlemen, and let me know if you need anything. 

thanks


You're welcome!