- All major tools have relocated to the SMBB from MEB
- Construction on the clean conference room (for summer temperature stability) has been completed
- LPCVD and oxidation processes are still operational in MEB until new USTAR cleanroom tube furnaces are qualified (ETA: end of May)
- TMV Sputtering tool is relocated and in position. The cryopump has been rebuilt and the recirculating cooling system and pneumatic control systems have been completely overhauled. We expect that tool to be back online by the beginning of May, then when projects calm we will be upgrading to 8 dedicated cathodes.
- After a long wait for the RTP, we have had to change suppliers, and expect that tool to arrive by June 1.