Postdoc Position in Nanofabrication – Princeton

Immediate Postdoc Position in Nanofabrication
A postdoctoral position in nanofabrication is immediately available in NanoStructure Lab at Princeton University.
Candidates will work in area of nanofabrication technologies, particularly, nanoimprint and applications in a multidisciplinary environment. The candidates should have a demonstrated successful research track record in nanofabrication, and a PhD degree in electrical engineering, materials, physics, or chemistry.
Candidates should email her/his resume to Prof. Stephen Chou,
Princeton University is an equal opportunity employer and complies with applicable EEO and affirmative action regulations. All qualified applicants will receive consideration for employment without regard to race, color, religion, sex, national origin, disability status, protected veteran status, or any other characteristic protected by law.

Free AFM Workshop

We will be hosting an upcoming workshop on nano-electrical AFM characterization methods, focusing on Peak Force Kelvin Probe Force Microscopy (PF-KPFM).

This free workshop will run from 10 am to 5 pm on January 13th 2016 and will include lectures as well as demonstrations on the Dimension Icon instrument in the Surface Analysis Lab.

Date/Time: January 13th 10:00 am to 5:00 pm
Location: Sorenson Molecular Biotechnology Building (SMBB) room 2650 (lectures) and room 2142 (demonstrations)

To register, please go to
and to schedule hands on time with the instrument, please contact

For more details, please see the flyer.

TEM Short Course 2016 Spring

This short course will provide a basic introduction to the concepts and theory behind TEM and analytical STEM, while focusing on developing practical skills in the use of the new JEOL 2800 analytical/STEM in the SMBB building. The class consists of seven one hour long lectures and seven three hour labs starting the week of January 11th. There will be one lecture and one lab per week for seven contact weeks. All students will attend the same lecture, and sign up for one, three hour lab section (maximum of three students per lab section) per week, choosing from the list of times available on the online sign-up sheet.

More Info and Sign Up – Signups Closed

Jobs at Advanced Materials and Nanosystems Group, Dynetics Corporation

Advanced Materials and Nanosystems Group at Dynetics Corporation is actively trying to hire someone with a microfluidics background and some cleanroom experience.  They have a really exciting program, but the candidates would need to be US citizens.  They’re not really looking for Ph.D.‘s., but a qualified candidate could have an associate’s, bachelor’s, or master’s degree.  The likely job title is (senior) process engineer, but the “senior” part would depend on qualifications.

Contact Information:

James L. Maxwell, Ph.D., Director
Advanced Materials and Nanosystems Group
Dynetics Corporation, Solutions Complex 4200,
1004 Explorer Blvd., Huntsville, AL, USA 35806
Phone:  256-713-5608

New nanometer scale 3D tomography

The Surface Analysis lab is pleased to announce the addition of 3D imaging and elemental mapping tomography to its high resolution S/TEM, the JEM-2800.

Through a collaboration between the U, S/TEM manufacturer JEOL and developer App5, we add another first-of-its-kind among academic institutions: the ability to map elemental compositional distributions in 3D. This is done by reconstructing images taken during a tilt series in STEM mode, including both structural information and EDS information. This is only feasible because of the extremely efficient collection of x-rays through the use of the large-area dual detectors configured on this microscope. For more information, see Dr. Brian Van Devener, Dr. Randy Polson, or Dr. Paulo Perez.

Annual Safety Training 2015

We have scheduled our annual safety training sessions on the following dates:

Thursday, September 3rd
1:00pm-3:00pm, SMBB 2650


Friday, September 4th
10:00am-12:00pm, SMBB 2650

Each Cleanroom lab member must attend one of the scheduled safety training sessions. Attendance is mandatory to retain access to the cleanroom. Please RSVP at the following link before Friday, August 28th: Click here to RSVP

In addition, College policies require that cleanroom lab members also attend the EH&S College of Engineering safety training: Click here to RSVP.

Please note: Lab members who only need access to the Surface Analysis Lab do not need to attend.

Light refreshments will be served prior to each training session.

Process Move from MEB Microfab to SMBB Nanofab Cleanroom Complete

nanofab staff

Congratulations to the Utah Nanofab Team for successfully migrating processes and capabilities from MEB to SMBB. It officially began just shy of two years ago (September 12, 2013) when we opened the lab for first operations in the photolithography bay. Now it is complete with the commissioning of the new w/d oxidation furnace which allows us to cease operations with the venerable Canary furnace stack in MEB.

For it’s efforts, the Utah Nanofab staff were awarded 2015 "Outstanding Service Award" by the College of Engineering. They received accolades at the annual College of Engineering all faculty and staff state-of-the-college meeting, a luncheon at Sawadee restaurant, and each received a $100 gift certificate.

Surface Analysis Lab Offers TEM Short Course: August 24 to October 19.

This short course will provide a basic introduction to the concepts and theory behind TEM and analytical STEM, while focusing on developing practical skills in the use of the new JEOL 2800 analytical/STEM in the SMBB building. The class consists of seven one hour long lectures, seven one hour long demonstrations, and seven three hour labs starting August 24th. There will be one lecture, one demonstration, and one lab per week for seven contact weeks. After completion of the course, students can register for independent use of the instrument to assist in their research.

  • Course: August 24th through October 19th (7 weeks, does not meet over Labor Day or Fall Break)
  • Lecture time/location: 9 am to 9:50 am Mondays, SMBB room 2650
  • Demonstration time/location: 3 to 3:50 pm Mondays, SMBB room 2650
  • Lab dates: (TBA, choose from one, three hour lab per week, go to /signups/ssal/2015-fall-tem to register for a lab section)
  • Recommended Textbook: Transmission Electron Microscopy: A Textbook for Materials Science, Williams & Carter.
  • Cost:
    $574 for University of Utah students
    $1148 for non-U of U students (industry)

SEM Short Course for 2015

Surface Analysis Lab Offers SEM Short Course: July 6 Aug 10, 2015

We are offering our annual Applied SEM short course starting the week of July 6 to August 10, 2015. The basic 5-week module will cover training on SEM imaging and EDS analysis using the Quanta 600F and hi-res imaging with the Helios Nanolab 650. An optional EBSD module is also offered for those who would need to do grain structure analysis on solid materials. We invite you to enroll and take this short course. For more information on enrolling follow the link below:

SEM Short Course 2015 SEM/EDS: July 6, 13, 20, 27 and Aug 3

EBSD: Aug 10 Cost: $385 (commercial: $770) for the whole course

Module 1. Basic SEM and EDS Analysis ($320 university; commercial $640): This is a practical short course in Scanning Electron Microscopy. The focus of the course will be on providing an applied understanding of basic theory of electron microscopy and microanalysis, while training students on the use of the FEI Quanta 600 and hi-res imaging in the FEI Helios Nanolab 650. (NOTE: The hi-res imaging lab in the the Helios does not constitute full training on FIB. A one-on-one training is still necessary to use the FIB for liftouts and TEM sample preparation.)

Consists of four (4) 1-hour long lectures and five (5) 2-hour labs TBD over a five week period.

Module 2. EBSD Analysis ($65 university; $130 commercial): Electron backscatter diffraction analysis allows for texture and grain structure studies on thin films and polished surfaces. This module will provide fundamental concepts of EBSD and training on basic operation and data analysis using the EDAX OIM system. Consists of one (1) 1-hour lecture and one (1) 2-hour lab.

dbFIB available for Business Access / new lower rates

We have opened up the FIB for off-campus and business training and services, including sample preparation lift-outs for the new Scanning / Transmisssion Electron Microscope (analytical S/TEM).

Access rates on the FIB have been lowered for all users, and we have created a special low rate for use of the HRSEM when only imaging is needed on the instrument.

Remarkable S/TEM Performance

The new USTAR/MRSEC analytical S/TEM has been producing remarkable results.  Guests from ORNL have brought in samples from Argonne National Labs to baseline the instrument, finding it ~4x more sensitive than anything they have in their own portfolio.  Come try out the performance, to get lattice resolution STEM images while simultaneously obtaining nm-resolution on EDS maps (spatial distribution of elemental constituents).  For delicate samples that can only withstand a single scan, you can still get sufficient EDS data for a meaningful map in a 90 second scan!

New Student Originated Projects (Funded by USTAR)

USTAR generously funded a program that allows students to propose their own ideas, and use the facilities and resources of the Utah Nanofab (cleanroom + microscopy) to build and/or characterize materials and devices of their own interest, independent of faculty funding.

Go to the main Nanofab website and click on the student link under the USTAR logo. Direct Link

Move Status

  • All major tools have relocated to the SMBB from MEB
  • Construction on the clean conference room (for summer temperature stability) has been completed
  • LPCVD and oxidation processes are still operational in MEB until new USTAR cleanroom tube furnaces are qualified (ETA: end of May)
  • TMV Sputtering tool is relocated and in position. The cryopump has been rebuilt and the recirculating cooling system and pneumatic control systems have been completely overhauled. We expect that tool to be back online by the beginning of May, then when projects calm we will be upgrading to 8 dedicated cathodes.
  • After a long wait for the RTP, we have had to change suppliers, and expect that tool to arrive by June 1.

Misuse of Tool Reservation System

Monthly thresholds and annual caps do not apply to misuse of the tool reservation system. If a lab user fails to cancel their equipment reservation they will be charged for any unused reservation time. 

Nanofab Update (USTAR Cleanroom and Surface Analysis Lab)

Utah Nanofab General Update

  • New rates and caps took effect July ‘14 with a simplified approach that eliminates charges for time in the lab, and provides online tools for PI’s to evaluate real-time cost tracking
  • Utah was selected as the host institution for the 2016 worldwide conference of peer cleanroom administrators:
  • Use of the Nanofab preliminary data seed fund (3 months use reimbursed) not heavily used /utah-nanofab-preliminary-data-seed-fund-application


  • All formal course-based laboratories are now relocated to SMBB cleanroom teaching labs as of Spring semester ‘15
  • Move from MEB will be complete by May, 2015 (only remaining tools/capabilities to be relocated include TMV (precious metals sputtering), electroplating, gold etch, LPCVD, solid state doping, and w/d ox)
  • sub-u mask-making is now available through acquisition of a second Heidelberg (nanofab reserve tool funds)
  • RTA/RTP (new capability through RIF mechanism) will become available by May, 2015
  • Prof. Tabib-Azar has written a DURIP proposal to bring in EBL (pending)
  • Prof. Gale is leading a proposal to create an NNCI (previously NNIN) node at Utah
  • Prof. Guruswamy is leading a proposal for an NSF MIP (Materials Innovation Platform)
  • Prof. Hanseup Kim is leading an MRI effort for controlled Si (DRIE and shallow poly) etch + oxide/nitride/carbide etch in an advanced SPTS cluster tool
  • Prof. Rajesh Menon led a pending RIF proposal for controlled electroplating
  • Prof. Ross Walker led RIF proposal last year and this year establishing an advanced electrical characterization user lab
  • Prof. Bruce Gale led a RIF pending proposal to establish a microfluidics prototyping user facility
  • Prof. Florian Solzbacher led an effort to create the Center for Engineering Innovation, including the acquisition of new tools: laser microwelding, uWire EDM, UV curing, digital comparator, expert access to machine tools…)
  • Prof. Ghandehari offered his Scanning Confocal Fluorescence microscope for use as a satellite tool administered by the HSC Fluorescence core, in order to improve the quality of expert support in SMBB for SCFM
  • Brian Baker and Ian Harvey led a pending Core RIF proposal to acquire a Keyence imaging system and to install two donated etch process tools from Fairchild Semiconductor
  • Next target tool acquisition: advanced sputtering capability, including feedback controlled reactive sputtering

Surface Lab:

  • S/TEM with ultrafast EDS is available for use: Training is ongoing as-needed, or staff are available to assist. FIB/STEM made possible by USTAR/MRSEC
  • Dr. David Belnap (HSC EM Core) led a Core RIF proposal to acquire Cryo EM (with plasma sample cleaner), for use with his JEM1400 and with the new JEM2800 / dualEDS
  • The Bruker D8 XRD is going to be relocating to the XRD recharge center in the Metallurgy department where it can be better supported, and can better support both MRSEC and MIP (Prof. Guruswamy)
  • Next target Instrument acquisition is for nXCT (sub micron resolution over 2-4" sample)

TEM Short Courses 2015

We are pleased to offer a new hands-on short course for the JEOL 2800 (S)TEM Instrument starting this February 16th, 2015:

Lectures: February 16th, February 24th, March 2nd, March 9th, March 16th

Where: SMBB Sorenson USTAR building
Lab: sessions each week at a variety of times

You may register for the course at the following link: (Signups Closed)

Equipment Move Schedule Update

We are on the home stretch of the equipment move into the SMBB Nanofab. Thus, there are some critical equipment move/installation plans that we need to make you aware of.


TMV Sputter System

  • March 10, 2015: Last day to use the TMV for six weeks (precious metal targets will be available for use in the Denton sputter system during this time period)
  • March 11-24: Uninstall, dismantle and move the TMV to SMBB
  • March 24-April 19: Replace water manifold and connect the TMV to facilities
  • April 20 (approx): TMV available for use in SMBB

Gold Etch

  • Feb 1-March 30, 2015: Modify wet bench in SMBB to accommodate gold etch
  • April 1, 2015: Begin using gold etch in SMBB (may still be used in MEB fab until this date)


  • April 1, 2015: Begin using electroplating in SMBB dicing saw room (may still be used in MEB fab until this date)
  • We have applied for RIF funding for an electroplating station with nickel and copper baths.


New Heidelberg MicroPG (with 0.9 um write capability)

  • Available for use beginning today: The new Heidelberg is up and running. Please see staff for training to become qualified to use the tool.

LPCVD furnace stack: TEOS, LTO, doped Poly, Silicon Nitride

  • Feb 1-Feb 28: Visits from field applications engineer to start up baseline processes
  • March 1-31: Characterization runs and process development bringing processes on line in sequence

RTP Rapid Thermal Processing Furnace: N2, O2, Forming Gas up to 1200 C

  • Feb 1: Shipping
  • Feb 10-March 31: Installation and characterization
  • April 1 (approx): Available for use

Wet/Dry Oxidation Furnace Stack in SMBB

  • Feb 1-April 30: Installation and testing
  • April 1 (approx): Available for use

Electrical Characterization Lab (ECL) (room 2115 SMBB)

Tools currently available for use (please see Tony Olsen for access):

  • MSOS404A High speed mixed-signal oscilloscope: 4 GHz, 4 Analog plus 16 Digital Channels
  • Keithley 4200 SCS
  • CV Meter
  • Wentworth probe station
  • We have applied for RIF funding of a Keysight E5061B network analyzer

Please let us know if you have any questions or concerns at

Annual Cap Rates Change

6-month review of new billing system produced the following change in annual cap rates:

After the 6 month review of utilization and revenues with the new rate schedule, We are adjusting the annual cap to account for additional users per project as:

$15k annual cap for first researcher on the project
$7,500 for second additional researcher on the same project
$3,750 for the third researcher
$1,000 for each additional researcher

For any researchers who capped out prior to December 2014, the prior cap will apply through the end of December 2014.  All hourly lab expenditures from FY15 (beginning July 1, 2014) will apply toward the new cap.

JEM-2800 S/TEM Training

In preparation for training to use the JEM-2800 S/TEM which will become available to us in the first week of September, we are recommending training as follows:

August TEM basic short courses on the JEM-1400 with Dr. David Belnap (HSC EM Core):

(this is the same UI and same sample handling as the JEM-2800)

Session 1

Basic TEM operations

Session 2


Session 3 (usually after the user spends significant time practicing)


Session 4

Other high-end functions depending on user’s preference: e.g. high-magnification imaging, low-dose imaging, diffraction, etc.

This course will cost $320 billable to a research project when the instrument time is shared between two students.  Please contact Dr. David Belnap for scheduling details.

MET E 5240/6240Advanced S/TEM ($150 lab fee subsidized by the Nanofab and by Prof. Guruswamy)

We strongly suggest that anyone signing up for this class also arrange for their research project to pay for the August short course from David Belnap.

1-on-1 Training

There will be individualized training on an ongoing basis when the staff are convinced that the researcher has the background necessary to jump in to the technique.  Otherwise we will request that students take a regimen of (above described) coursework just as we do when students request to train on the XPS.

Advanced Knobology:

If anyone is already familiar with S/TEM operation and just needs to understand the user interface, please contact SAL staff directly to arrange for training with JEOL technicians.

Sample Preparation: Please contact us if you need to begin developing a protocol for your specific samples

– Ion milling and dimpling sample preparation techniques are now available in the USTAR Surface Analysis lab at a price of $20/sample (smorgasbord pricing includes all techniques necessary for the per-sample price).

– FIB sample preparation seems to be the popular technique for STEM analysis currently, due to the ability to select exactly the location where the analysis is to be done, and so preserve the spatial context for the hi-resolution imaging.  If you need to access FIB-lift-out techniques, we are planning to charge per-hour, at least until we get a better feel for how long these techniques take to prepare a sample.  There is a large dependency of successful FIB lift-out yield on the nature of the sample itself.  Pricing is estimated to be $400-500 per sample, based on estimated hourly usage for tool and driver.  If you wish to train on the FIB, and you have 50 hrs of stick time on either the Quanta, the NovaNano or another FIB, please come see us.

Thank you,

Ian Harvey

Arrival of the JEM-2800 Hi-res Analytical S/TEM with Fast EDS

Dear S/TEM enthusiasts!

The high resolution JEOL 2800 S/TEM with ultrafast EDS (twin high count detectors) has arrived!

This first-of-its kind in the Americas instrument is being assembled on site and is expected to be functional the first week of September. Monitor progress at the Surface Analysis Lab (SMBB room 2149).  We at the Nanofab are excited to see how this USTAR/MRSEC-funded instrument will make research at the U even better.  We will be hosting an applications open house once the instrument is running where we will evaluate any non-outgassing samples free of charge.

One of the challenges of this instrument is adequately prepared samples: samples are required to have a thickness of 100nm or less.  Synthesized nano particles are straightforward since they are already at the proper size scale, and can be easily attached to membranes, which you can obtain or we can supply.  Bulk sample preparation requires extensive thinning from time-consuming and low-yielding processes comprising either grinding techniques or FIB lift-out.  We have these tools in-house too, so come talk with us about your sample preparation needs and we can begin developing protocols.

Pricing for sample prep is a straight-up $20/sample encompassing the small tools smorgasbord style, and $84/hr + tech time for the FIB (on-campus rates).

Note that this instrument IS available for use by for-profit entities, thanks to JEOL for paying the import duties.

Details on training will be coming out separately…

See you soon!

Randy, Paulo, Brian, Ian

Billing System Changes Informational Sessions

Just a reminder about the information session regarding the new billing system going into effect July 1. 

Friday June 27, 10 am, SMBB Auditorium 2650
Monday June 30, 3pm, SMBB Auditorium 2650

Some highlights:

For the Surface Lab
Lower rates on many tools in the surface lab
Introductory rate of $80/hr on the S/TEM
new monthly $ cap on overnight unattended imaging runs

For the Cleanroom
Infrequent users benefit from lower hourly tool rates, per-tool
Moderate users benefit from monthly threshold
Big projects benefit from ease of budgeting and motivation to add multiple student researchers
No entry fees; no safety buddy fees; no fees for mentoring/observing
BUT: we will be charging for all reservation + enable time

Thanks to our sponsors the Office of the VP-Research and the COE, these low rates are available to U of U campus researchers.

Looking forward to working with you on the successful implementation of these new rates.

Denton E-Beam and Sputter Move Completion ETA June 19th

Dentons Installation Update:

Both systems are in place in the Thin Films Deposition Bay F in SMBB. We have been doing a significant amount of decontamination and cleaning in an effort to NOT introduce any oil or hydrocarbons into the SMBB nanofab. We have also tried to address the cryo pump long-term maintenance during this downtime, both systems will have rebuilt pumps for start-up. All this has taken a little longer than our estimate, which is now to be qualifying systems for use on Wednesday.

Sorry for any inconvenience this may be causing.

Steve Pritchett

Nanofab Staff

Denton E-Beam and Sputterer Scheduled to Move June 2nd

We anticipate having utility connections prepared in SMBB for the Denton E-beam and Denton Discovery 18 sputter by June 2, 2014. And on June 2nd will need to shutdown these 2 systems for the move and install in SMBB. We are planning 2 weeks or less for downtime to move,  install and qualify.

Note: We may need to fine tune move date by a day or 2 as we close in on June 2nd.

Please see if you can work around this inconvenience and support our efforts getting more equipment into the SMBB nanofab.
Other equipment moving in the near future will be Oxford 100 DRIE etcher, Technics etch-strip, ALD, SCS parylene coater, Oxford 80 etcher & PECVD and Xactix etcher.

Surface Analysis Short Courses 2014

Registration Period Has Been Extended

We are pleased to offer several hands-on short courses this summer: SEM, EDS and EBSD :


	SEM: June 2, 9, and June 16
	EDS: June 23
	EBSD: June 30

Where: SMBB Sorenson USTAR building Lab: sessions each week at a variety of times Cost: $120 for SEM, $40 for EDS and $40 for EBSD for on-campus members. Off-campus rates are $300, $100 and $100.

Instrument descriptions are located at:

More details in the announcement flyer.

You may register for the course at the following link: Signups Closed

Surface Analysis Lab Signups

For those of you who are signed up for the Surface Science and Analysis class (CHEM 7780, ECE 7960, MET E 7910), you can sign up for your lab sessions online here:

Signups Closed

Don’t forget to take care of the lab fee of $360 with Amy.

Day-Use Hours Extended

We are pleased to announced that, beginning next monday Feb 10, the "day-use" hours for the microscopy facilities will be extended from 8am – 9pm.

Heavy use of the XPS and SEM particularly, has motivated us to increase our professional staff coverage into the evening, which will be implemented by the shift tag-teaming of Dr Paulo Perez and Dr. Brian Van Devener.

If you are planning overnight FIB jobs (EBL, slice and view 3D nanotomography, large area montage), you should still plan to coordinate those with Dr. Randy Polson so the job begins by 5pm.

Please do take advantage of the expertise offered here. You may easily submit requests for analysis either by chatting with Randy, Paulo and Brian, or by submitting a service request form:

Hi-Res SEM Imaging Seminar

Dear SEM/TEM enthusiasts, and customers of Nanofab surface analysis and nanoscale imaging,

Do you wish you had better resolution or depth of field than you are getting in your SEM images? Want to pick up more subtle surface detail?

Wish your nano-scale patterning was capable of feature definition at 5nm pitch?

If so, please plan to attend a seminar and/or come chat with the experts about your hi-res SEM imaging or FIB machining applications.

What: formal seminar at either 10-11 am or a repeat at 1:30-2:30pm. Come chat about your application any other time 8:30am – 4pm
When: Monday, Feb 3, anytime between 8:30am − 4pm. Light refreshments are being served (courtesy Zeiss)
Where: SMBB auditorium and atrium (Sorenson/USTAR building west side, ground floor by the cafe)

Want your samples analyzed? Sign up at one of the below time slots (see link), bring your sample and some indicative images showing what interests you. Zeiss will either show you what the instrument can do in similar applications, or they may accept your sample in the queue and send you images.

Sign up here:
Signups Closed

The first step in acquiring new capabilities is always gauging interest and applications. This instrument has broad application for both life and physical sciences and hence is an excellent fit for the roadmap of the campus-serving multidisciplinary facilities in the USTAR building. See you Monday, Feb 3rd.

Thank you,
Ian Harvey

Utah Nanofab Associate Director

SEM Short Course 2013

We are pleased to offer the popular 3-week hands-on short course, Scanning Electron Microscopy:

When: Tuesdays Dec 3, 10, 17
Time: 11am – noon
Where: SMBB Sorenson USTAR building, second floor (large conference room or auditorium, depending on attendance)
Lab: sessions each week to be scheduled when the student roster is established
Cost: $120. If a company is paying for the registration fee, the price is $300.

You can elect to be trained on either the Quanta ESEM (Hi-vac, low-vac modes) or the Hitachi S4800 (Hi-vac, hi-res). After this training we expect you will be proficient enough to use the instrument by yourself following one more one-on-one session with your own samples.

This training or the equivalent (+ 50 hrs stick time) is required as a pre-requisite for learning to use the dual-beam Focused Ion Beam (FIB/SEM) instrument.

Instrument descriptions are located at:


DOE/SPC class opened up to all Nanofab Labmembers

Dear Lab Members,

When Intel came to us recruiting in late September, they were very impressed with our new cleanroom and microscopy facilities and asked that we prepare our students better to enter the tech manufacturing workforce by teaching our students the tools of everyday engineering: statistical experimental design, or in the jargon "Design of Experiments" (DOE), and Statistical Process Control (SPC).

DOE is a means of designing efficient and cost effective experiments to determine principal effects of process variables on performance outcomes, and also identifying interactions between variables. It is highly complementary to mechanistic approaches of experimental design that we normally teach in academic environments, and many graduate students have found the technique helpful in expediting their own graduate research with higher confidence in the results and conclusions.

SPC is the main tool for evaluating and reducing sources of manufacturing variability; hence SPC is the main engineering technique for reducing cost and improving quality in volume manufacturing.

Please note that Intel’s message is the same message given to us by Micron, IMFT and Fairchild, and also other volume tech manufacturers like Merit Sensors and Blackrock Micro.  This is why the College of Engineering has re-started the course ME/ECE 6055/5055 Microsystems Design and Characterization with Engineering Initiative Funding. Our instructor, Dr. Jim Smith, is opening up the section of that course dealing with DOE/SPC, so that all Nanofab lab members may participate. This segment is once again taught by student-favorite, visiting lecturer Jim Pugmire, Staff Statistician at Fairchild Semiconductor, our local semiconductor partner. If you wish to become conversant in critical tools for experimental design, either to benefit your own research, or to not look stupid sitting in interview sessions, then come join us:

Three lectures, 8 to 8:50 am. WEB 2250.

  • Oct 22: Lecture on SPC
  • Oct 24: Lecture: finish any SPC leftovers; hypothesis testing and regression
  • Oct 29: Lecture: DOE overview factorials to RSM

Lab Session: Oct 31 statapult exercise for DOE lab

One of five lab sessions, limited space available. You must RSVP for one of the following lab sessions.

  • Session 1: 8-8:45 am
  • Session 2: 9-9:45 am
  • Session 3: 10-10:45 am
  • Session 4: 1:30-2:15 pm
  • Session 5: 2:30-3:15 pm

USTAR Cleanroom Mini Opening

The Utah Nanofab Cleanroom is open for research!

For access, you need to complete BOTH specific training on the new photolithography tools with Brian Baker, and walk-through safety training with Tony Olsen (see links in the news item below).

This is not to be confused with the GRAND opening, which will occur when we finish moving all functions from MEB to the USTAR cleanroom of the Utah Nanofab.

We have completed installation of the first photolithography tools, including EV 420, photomask patterning (Heidelberg), and several spinners, including one with autodispense.

Over the next few weeks we will be taking down and relocating the remaining research photolithography capability (Suss aligner and wet benches), leaving the teaching lab photolithography capabilities intact until the very last move cycle.

Sign Up For Safety Training

Tony Olsen will be leading safety training sessions to introduce participants to the new protocols and safety issues in our cleanroom in SMBB.  Any lab members who need access to the cleanroom will be required to attend a safety training session first.  Please visit the safety training registration page to find a time slot that fits your schedule.

If you are visiting our cleanroom in order to use our photolithography tools, you will need to also attend one of the photolithography sessions that will be hosted by Brian Baker. 

Tool Moves for August 22, 2013

Update for Group 1 of Tool Move:

Tool Name Date to be disconnected Date to be operational*
EV 420 Aligner 08/22/13 09/12/13
EVG 520 IS Wafer Bonder 08/22/13 09/12/13
Heidelberg MicroPG 101 Mask Writer 09/03/13 09/12/13
Laser Mark 4000 Nd-YAG 08/22/13 09/05/13
Optec Micromaster KrF 08/22/13 09/05/13
Strasbaugh 6EC CMP 08/22/13 09/05/13

* Subject to inspection and occupancy approval


To support the contractor work and utility connection in the SMBB nanofab we will need to disconnect and move equipment.  The first items moving are the EV 420 aligner and Ev 520 wafer bonder. We plan to disconnect and move out on Thursday 8/22/13. The Heidelberg uPG101 Mask writer is in this group, we hope to delay disconnect and move until ~ Tuesday 9/3. We hope to have release and approval to power up best case  ~ 9/10 with return to available status  within 1-2 days. 

For 8/22 move we plan to add on packaging equipment – NdYAG Laser Mark, Optec KrF laser and CMP for move into CMP room. Down time for packaging equipment should be less than 2 weeks.

We anticipate the Group 2 (remaining research photo/litho) equipment to begin disconnect and move after the Group 1 is operational.

Newsletter for Summer 2013 Published

Today, we sent out the Summer 2013 edition of our quarterly newsletter.  Get an update on all of our ongoing projects and acquisitions by browsing through the news items in the archive.  If you are not on our mailing list, please sign up so we can keep you posted.

Fairchild co-op Internship

Please see the following email message for information regarding an internship opportunity at Fairchild Semiconductor.

Dr. Harvey,

I wanted to let you know that we have an opening for a Failure Analysis Engineering Co-Op student to work part time in the lab at Fairchild Semiconductor here in West Jordan. If you have any interested students, please have them send me their resume and apply online. The job is posted on under the "Careers" section.


Aaron Smith

Internships at Blackrock


Mechanical, Chemical or Electrical Engineer Intern Position

            at Blackrock Micro (<1 mile from University of Utah)


Position Summary:

      This intern position will be a key player in the optimization of processes, design of mechanical fixtures, and development work on medical devices. 

      This intern position will require up to 20 hours per week during school and 40 hours per week during summer break.  This position will be flexible to ensure course work requirements are not impacted. 

This position will aid in your scientific and engineering learning experience and could be a key initial step in building your career.




       Desire to learn more about how medical devices work and how they can be improved

       Interested in creating, organizing and interpreting experiments designed to further improve medical device performance

       Experience a bonus in writing specifications or documentation to demonstrate how a medical device is constructed.

       Strong, written and verbal communication skills and the ability to work effectively with team members from a variety of engineering & manufacturing disciplines is required.

       Enjoy collaborative brainstorming, problem solving & development efforts. Get along with and interact well with a team.

       Self-directed & Self-motivated.

       CAD modeling software experience using Solidworks is a plus.

       Circuit design experience a plus


Duties & Responsibilities Include:


Develop components/fixtures, assemblies and equipment relating to miniature MEMS devices. Designing manufacturing fixtures, test fixtures, etc.

Conceive design solutions. Develop concepts, prototype, and test the implementation of those solutions.

Collect, organize and present data found during testing

Work with vendors to source materials, and get prototypes and parts built.

Document designs, components, test & manufacturing methods, etc.


If interested please, email resume and cover letter to Gruenhagen) and Ravuri)



Distinguished Seminar Series: Janusz Bryzek, Phd

Distinguished Seminar Series 
Venture Capital Model for Technology Commercialization with a Focus on Emerging Trillion Sensor Opportunity 
Janusz Bryzek, PhD 
Vice President of Development, MEMS and Sensor Solutions, Fairchild Semiconductor

Friday, December 7th, 2012, 2:00 pm
Warnock Engineering Bldg. (WEB) 1230
Reception to follow at 3:00 pm


Abstract: There are two phases in commercialization technologies:
Phase 1: using money to develop technology.
Phase 2: using technology to make money.
While the first phase is reasonably easy, it is dramatically more difficult to execute Phase 2.  

Venture Capital Industry developed a model enabling increased probability of success and acceleration of the commercialization cycle. As a gage of this models efficiency, National Bureau of Economic Research credits VC industry with 15% of US innovation, while representing only 3% of R&D funding. 

This presentation will overview filters VC firms use in their due diligence process. It will follow up with characterization of emerging opportunities in MEMS industry forecasted to grow from $11.5B and 7.4B units in 2012 to $21.1B and 18.8B units in 2017. Brief introduction to even bigger growth potential to trillion sensors in 2022 will be included. Such growth is forecasted by selected visionary companies. TSensors Roadmap working group is being formed to develop advance visibility of these emerging applications Presentation will conclude with an overview of products developed in selected authors startup. 

Bio: Dr. Bryzek cofounded eight Silicon Valley MEMS companies: Sensym (now Honeywell), ICSensors (now Elmos/MSI), NovaSensor (now General Electric), Intelligent MicroSensor Technology (now Maxim), Transparent Networks (now Intel), LVSI (now Atmel), Jyve (now Fairchild Semiconductor), and strategic marketing consulting BN Ventures. Currently Bryzek is VP Development, MEMS and Sensor Solutions, at Fairchild Semiconductor, after acquisition of Jyve Inc. in November 2010, 

Bryzek received his MSEE and Ph.D. from Warsaw Technical University, Poland. He completed Executive Management Program at Stanford University. In 1989 he was recognized as Entrepreneur of the Year by Arthur Young. In 1994 he was awarded the Lifetime Achievement Award by Sensors Magazine for the achievements in MEMS field. In 2003 he was awarded a lifetime Achievement Award by MANCEF. 

Feature Article on is showcasing a research paper by University of Utah faculty Tanya Abaya, Steve Blair, Prashant Tathireddy, Loren Rieth, and Florian Solzbacher.

From the website:

In a recent paper published in Biomedical Optics Express, Abaya, et al. presented a novel device structure that facilitates three-dimensional deep-tissue light penetration with capabilities for simultaneous spatiotemporal modulation with different wavelengths.

You can find the original article at Optics InfoBase.

nanoUtah 2012

The 2012 nanoUtah Conference & Exhibition builds on the rich tradition of past events. Anchored by presentations from international and local leaders in nanoscience and nanotechnology, the conference fosters collaborations and the exchange of knowledge among scientists, engineers, clinicians, industry leaders, and students. More Information

University of Arkansas Positions

Post-Doc Positions in Electrodynamics Modeling, Fabrication and Characterization

The following job opportunity has been forwarded to us from D. Keith Roper, Ph.D. at the University of Arkansas. Please contact him if interested.

I am looking for two post docs to maintain continuity and move research forward in my lab during the period my assignment at NSF. I attached the position announcements. Would you let me know if you are aware of anyone looking for a post doc that may be a good fit. Please feel free to forward the announcements.

Here’s a summary of the environment for the positions:

Significant opportunities for a post-doctoral fellow in my lab include:

  • Location in new NANO building in Institute for Nanoscience and Engineering (
  • Interaction with faculty, staff, researchers, and resources in College of Engineering, Fulbright College, and Microelectronics/Photonics Graduate Program
  • Mentor graduate researchers at Univ of Arkansas: ranked very high research activity by Carnegie Foundation
  • Support for travel to professional meetings

Current research in the lab include modeling, fabrication, and characterization in areas of:

  • Nano/bio photonics relevant to health, sustainable energy, communications, and security
  • Plasmonics: electron-optics, thermoplasmonics, fabrication, characterization
  • Electrodynamics and transport modeling: FDTD, DDA, CDA, continuity
  • Nanocomposite metamaterials: metallic, polymer, oxide constituents

D. Keith Roper, Ph.D.
Director, Nano Bio Photonics Lab, University of Arkansas
Program Director, NSF ENG Engineering Education & Centers
dkroper -at-
ph (703) 292-8769
fax (703) 282-9051

Annual Safety Training

The Utah Nanofab will be having its annual safety training meeting at the beginning of the Fall semester.  There will be two sessions and attendance to one of the sessions is required for any members who are planning to use the cleanroom.  The first session will be held on August 23rd from 11:00am to 12:30pm and the second session will be held on August 24th from 2:00pm to 3:30pm.  Both sessions will be held in SMBB 2650.

Radiation Resistant Circuits

The University’s Unews site is highlighting some research done by Professor Massood Tabib-Azar.  His research group has developed mechanical logic gates that can withstand intense heat and radiation.  Read more on the unews post

Quantum Dots Project Wins New Venture Challenge

A group of students from the University of Utah won a $100,000 prize at the regional CU Cleantech New Venture Challenge on April 20th for their work in commercializing a new method of manufacturing quantum dots. Read more from the KSL news story.

SMBB Grand Opening

From the College of Engineering News Site:

The April 2012 dedication of the James L. Sorenson Molecular Biotechnology Building—A USTAR Innovation—centermarks the beginning of a new era of interdisciplinary translational research at the University of Utah. It is the centerpiece of a visionary plan to bridge the U of U main campus and health sciences in order to accelerate research at the interfaces of medicine, engineering, pharmacy, science, business, law and digital media.

Micron Microscopy Core Operational

All tools from the surface lab in MEB have been moved into the Micron Microscopy Core in the Sorenson Molecular Biology Building and are now online and operational.  These include:


  • AFM, Bruker Dimension Icon

  • dbFIB, FEI Helios NanoLab 650

  • Ellipsometer, Woollam Spectroscopic

  • Microscope, Polyvar MET

  • Optical Profiler, Zygo NewView

  • SEM, FEI Quanta 600 FEG

  • SEM, Hitachi S-4800

  • XPS, Kratos Axis Ultra DLD

  • XRF, Eagle III Microspot

For more information on a specific tool, please visit the equipment web pages.

Welcome to Steve Pritchett, New Senior Process Engineer

The Utah Nanofab is pleased to announce the hiring of Steve Pritchett as a Senior Process Engineer supporting the nanofab transition into the SMBB(USTAR building).

Come talk with Steve when you need assistance in developing or characterizing new processes, as he specializes in dep, etch, and CMP processes.  You can find him in 1280 MEB, fab office phone (801) 585-5676 or email

Steve comes to us with a wealth of electronic packaging, semiconductor device and optical products manufacturing experience. At MOXTEK Steve covered thin film deposition and capacity/fab expansion projects. At Fairchild/National Semiconductor, Steve worked in process development for thin films and for product development their CSP’s (Chip Scale Packages).  The CSP work involved bumped contacts, wafer grind and etch for thinning and backmetal. Steve started his career at a small company acquired by National Semiconductor, Comlinear Corp., where he supported hybrid and MCM electronic product fabrication and assembly, based on a ceramic thin film substrate in hermetically sealed packages.

Utah Nanofab Move to Sorenson Molecular Biology Building Update

The new Sorenson Molecular Biology Building (The USTAR building) was given a temporary occupancy permit on December 12th.  We are happy to say that our move is progressing smoothly with the first of our staff members already relocated, and we look forward to moving the Surface Lab into the new Micron Microscopy Core by mid-February, along with the dicing and packaging labs.  In order to keep our community of lab members informed on all the changes, we will be posting news updates regularly on our website.

New Instruments Coming On-line

During the same week we received occupancy in SMBB, we installed two brand new instruments in the Micron Microscopy Core, A Hitachi S-4800 UHR SEM (with Oxford EDS), and an FEI Helios 650i dual-beam SEM/FIB (with omniprobe and gas injectors for metal deposition (Au, Pt), and etch (XeF2, H20 (for organics), and iodine).

Move Progress

We are currently in the beginning stage of a transitional period as we move our tools from MEB to SMBB.  We will be maintaining both facilities during this period until we are able to move all of our equipment to the new labs.  We are moving tools in groups based on priority as moving funds become available, with an eye toward minimizing downtime for any given process, or ensuring that a comparable process is online while another is being moved. 

Staff Contacts

The staff office space has largely been completed and half of our staff have already formed an "away team" to manage all the projects and issues related to life in the new building.  During the transitional phase of the move, many of our staff will be spending their time split between our two locations.  If you need to contact a staff member, please check the staff contact page for up to date phone numbers and other contact information.

Neural Interfaces Conference in Salt Lake City

Headquarters Hotel: Salt Lake City Marriott Downtown Hotel

Sponsorship Information:

Richard A. Normann, PhD

Conference Co-Chairs:
Richard A. Normann, Ph.D. and Florian Solzbacher, Ph.D., University of Utah

Registration and other information available at the website.

nanoUtah interview on KCPW

KCPW featured an interview with Dr. Florian Solzbacher and Michael O’Malley in their city views segment.  You can find the broadcast audio on their website.  The interview is in the second part of the broadcast.

Deseret News Article: Nanotechnology and the Pac-12

The University of Utah’s move to the Pac-12 promises exciting times ahead from an athletic perspective. Although less publicized, joining the ranks of some of the world’s most prestigious research universities ushers in even more exciting times for Utah’s economy.

One area of research, in particular, stands out as an unparalleled opportunity. Perhaps the largest impact for the U. may take place on a much, much smaller playing field in the realm of nanotechnology research and development.
Slice a meter-long object a billion times and you have the unit of measurement called the nano. Nanotechnology deals with the manipulation of particles at the atomic and molecular level. This science is affecting everything from medicine and energy to computing and telecommunications. It promises to make the likes of drugs, solar panels, chip manufacturing and wireless components faster, cheaper and more efficient. For example, fiber optic lasers are being studied at the U. to heat up extremely small gold nanorods inside cancer cells. This process consequently burns the cancer cells from the inside out.

Through the leadership of USTAR — the Utah Science Technology and Research initiative — the University of Utah is quickly becoming a national leader in the commercialization of nanotechnology research. The upcoming completion of a major new building on the Utah campus will further position the university for success in the sciences.

Coming in December: A new, UHR 3D micro-imaging capability

With many thanks to FEI Company for the extended evaluation we have enjoyed of the Quanta 3D FEG, we will be saying ‘good-bye’ to that loaner in mid-May, as it has been sold.

We will be replacing the Quanta with a much higher resolution instrument, the Helios, which will be moving to the Micron Microscopy Core labs of the Sorenson Molecular Biotechnology Building (SMBB), in December, 2011 (immediately upon commissioning).

The UHR instrument coming to the U in December is described here:123

What is a nanofab?

A “poster child” is the Utah Neural Array developed in the Utah Microfabrication Core Lab by Richard Normann who effectively established an engineering linkage to a series of medical applications. This effort became commercialized in his Bionic Technologies, Inc. then in Black Rock with the ultimate development of a new, local cleanroom, accompanying jobs and additional University collaborations. There have been multiple human surgeries (motor cortex implant) with the commercial Electrode Assembly, enabling quadriplegic individuals to begin controlling computers and artificial limbs through their volitional thoughts. Further substantial NIH grants have been awarded to Utah PI’s based on development of this and related local know-how.

Anticipated outcomes from similar collaborative efforts include new ideas through effective seeded collaborations (facilitated by seminars, open use labs and other interactions); more effective research proposals seeded by user fee sponsorship to obtain preliminary data; superior research enabled by better equipment, instrumentation, & expertise; and more, stronger companies maturing through start-up, based on an industrial preliminary data seed fund and cost-effective access to needed sponsored resources.

nanoUtah 2010 Conference Featured on KSL News


The University of Utah Nanofab is one of the exhibitors in this year’s nanoUtah conference.  The 2010 installment of the nanoUtah Conference builds on the rich tradition of past events. Anchored by presentations from Utah’s leaders in nanoscience and nanotechnology, the conference is intended to foster collaborations and the exchange of knowledge among scientists,  engineers, clinicians, industry leaders, and students.  KSL news covered the event in this video.