How to Have Your Part or Wafer Coated with a Precious Metal

• Services provided
• ALD Atomic Layer Deposition: Pt (other materials also available)
• Sputter: Au, Pd, Pt, Ir, IrOx (adhesion layers (Ti, Cr, etc) and other metals and insulators available without breaking vacuum)
• E-beam: Au, Pt (adhesion layers (Ti, Cr, etc) and other metals available without breaking vacuum)
• Contact Nanofab Cleanroom staff with coating details (material to be coated, desired thickness, substrate/part material and size and quantity) https://www.nanofab.utah.edu/lab-staff/#process (Brian Baker)
• Staff will examine your requirements and give you an estimate for coating time and cost (e-beam, sputter, ALD are available options)
• Set up a Nanofab account (https://workauth.cores.utah.edu/#/offcampus)
• Ship your substrates to Nanofab Cleanroom staff 
• After you approve/authorize the process, staff will coat your substrate/part and ship it back to you