HSC Bug Report This is ONLY for the cleanroom. If you have a problem with HSC in the Surface Lab, please, contact Brian Van Denever (bvandev@chem.utah.edu) HSC Bug Report Form Date and Time Your Email Address * Where did you encounter the bug? * Reservation (Lock/Unlock)Supply CheckoutData Collection (Run Data)Sign in or sign outWalk-up Tool Type of supply (a category such as: wafers and substrates, misc. supplies, etc.) * Precious MetalsWafers and SubstratesE-Beam CrucibleMasks and HoldersMiscellaneousSample HoldersTapesTweezers Timeframe * Outside of reservation timeframe (excluding grace periods)Within reservation timeframe If you are within 30 minutes of your reservation stop time, then you ARE within your reservation timeframe. Was the tool locked when you first arrived (grey screenlock, unpowered screens or controllers) * Yes No Were you able to successfully re-lock the tool? * Yes No Tool Category * DepositionDry EtchingFurnacesLaser SystemsLithographyMeasurementMicrofluidicsMicroscopyPackagingPattern GenerationTest and Electrical CharacterizationUV IR Magnetic Measurement DevicesUncategorized Misc. Tool Name and Owner (Deposition) * ALD - Cambridge Fiji 200E-Beam - Denton SJ20GaO MOCVD - Agnitron ImperiumParylene - SCS PDS 2010Sputter - Denton 635Sputter - Denton Discovery 18Sputter - TMV Tool Name and Owner (Dry Etching) * DRIE - Oxford 100 ICPIsotropic - Xactix X2 XeF2RIE - Plasmatherm Metal EtchRIE - Technics PE II-A Tool Name and Owner (Furnaces) * Atmospheric - Protemp CleanOxAtmospheric - Protemp DopedOxLPCVD - Expertech CTR125 LTOLPCVD - Expertech CTR125 NitrideLPCVD - Expertech CTR125 PolyRTP - Allwin AccuThermo AW 610Box Furnace - Blue-M Tool Name and Owner (Laser Systems) * DPSS Samurai UV LaserLaserStar 1900 WelderUniversal PLS6.15D CO2 Laser Tool Name and Owner (Lithography) * Spin Coater - CEE 100Spin Coater - CEE 200X 1800Spin Coater - CEE 200X 9260Spin Coater - CEE ApogeeSpin Coater - Headway EC101Aligner - EV 400Aligner - EV 420Aligner - OAI 800Aligner - SUSS MA1006Oven - Binder FD53-ULOven - Memmert Glass 250Oven - Memmert N2 300Oven - YES HMDS1 Vapor PrimeOven - YES LP-III VacuumHot Plate - CEE Apogee N2 Tool Name and Owner (Measurement) * 4 Point Probe - Microtech RF-1Ellipsometer - Woollam VASEFilm Stress - Tencor FLX-2320Film Thickness - n&k 1500Film Thickness - Nanospec 3000Profilometer - Tencor P-10Profilometer - Tencor P-20H Tool Name and Owner (Microfluidics) * CEE 200X PDMS Spin CoaterEnercon Dyne-A-Mite Ozone PlasmaMarch Plasmod O2 RIEVWR 1410 Vacuum Oven Tool Name and Owner (Microscopy) * Keyence VHX-5000Olympus LEXT OLS5000SEM - JEOL IT200 LV Tool Name and Owner (Packaging) * Dicing Saw - Disco DAD3320Dicing Saw - Disco DAD641UV Tape Release - UVM-102WWafer Bonder - EVG 520 ISWire Bonder - MEI Wedge BonderWirebond Pull Tester - UTI Tool Name and Owner (Pattern Generation) * Heidelberg DWL 66+Heidelberg MicroPG 101Heidelberg MicroPG 101-2 0.9/2.5umNanoFrazor ExploreNanoScribe 3D Photonic Pro GT Tool Name and Owner (Test & Electrical Characterization) * Keithley 4200 SCSKeysight 404A Mixed Signal OscilloscopeKeysight E5061B Network AnalyzerMicromanipulator Probe StationTektronix TDS 202 B Oscilloscope Description of problem * Please be as specific as possible. Tell us why you don't think the system was working as intended. Provide critical information such as: time of bug, time of reservation block. Screenshot Drop a file here or click to upload Choose File Maximum file size: 419.43MB Please upload a picture of the error that you received on your screen. reCAPTCHA