MEMS/Sensors

 

Image

 

 Title Authors Links Nanofab Process used
Screen Shot 2018-10-15 at 4.17.10 PM A Monolithically Integrated Multi-Sensor Platform N. Banerjee1
A. Banerjee1
N. Hasan1
S. S. Pandey1
B. P. Gogoi1
C. H. Mastrangelo		 https://ieeexplore.ieee.org Deposition
Screen Shot 2018-10-15 at 4.48.52 PM Design and Simulation of Contour mode MEMS Resonator on Si for Power Converters Abusaleh M. Imtiaz
Faisal H. Khan		 https://ieeexplore.ieee.org Lithography
Screen Shot 2018-10-15 at 4.10.06 PM Contour mode Piezoelectric Ring Micro-resonators on Si for Series Resonant Converters Abusaleh M. Imtiaz
Faisal H. Khan
Jeffrey S. Walling		 https://ieeexplore.ieee.org Lithography
Screen Shot 2018-10-15 at 4.36.19 PM Piezoelectric Microresonators on Si for Inductor Free Embedded (on-chip) Power Converters in pv Powered Autonomous Microsystems Imtiaz, Abu Saleh Mohammad https://search.proquest.com Lithography
Screen Shot 2018-10-15 at 4.44.34 PM Contour-Mode Ring-Shaped AlN Microresonator on Si and Feasibility of Its Application in Series-Resonant Converter Abusaleh M. Imtiaz
Faisal H. Khan
Jeffrey S. Walling		 https://ieeexplore-ieee-org Lithography
Screen Shot 2018-10-15 at 4.46.17 PM Microplasma transistor for harsh environment applications Pai, Pradeep https://search.proquest.com Lithography
Screen Shot 2018-10-22 at 2.53.00 PM Fabrication, Characterization, Optimization and Application Development of Novel Thin-layer Chromatography Plates Supriya Singh Kanyal https://scholarsarchive.byu.edu Chemical Vapor Deposition (LPCVD)
Screen Shot 2018-10-29 at 2.35.48 PM TiOx Memristors with Variable Turn-On Voltage using Field-Effect for Non-Volatile Memory Pradeep Pai
Faisal K. Chowdhury Tien-Vinh Dang-Tran Massood Tabib-Azar		 https://ieeexplore.ieee.org  Denton 635LL
Expertech TEOS / LTO / PSG /
5398565-fig-1-source-large A comparison of fabrication methods for Iridium Oxide reference electrode Robert K. Franklin ; Segyeong Joo ; Sandeep Negi ; Florian Solzbacher ; Richard B. Brown  https://ieeexplore.ieee.org Denton Discovery 18
 Screen Shot 2018-10-31 at 4.05.52 PM Dual Gate Architecture for High Sensitivity, High Selectivity Chemical-Sensing Field Effect Transistors Benjamin R. Bunes
Trevor Knowlton
Daniel L. Jacobs
Paul Slattum
Ling Zang		 https://ieeexplore.ieee.org

lift-off lithography
 Screen Shot 2018-11-01 at 3.45.30 PM

Nano-gap Vapor Sensor

 C. Ghosh
S.H. Khan1
S. J. Broadbent2
HC. Hsieh1
S. Noh
A. Banerjee1
N. Farhoudi1
C. H. Mastrangelo1
R. Looper
H. Kim1		 https://ieeexplore.ieee.org  Lithography
 Screen Shot 2018-11-02 at 2.28.40 PM Spin Rabi flopping in the photocurrent of a polymer light-emitting diode D. R. MCCAMEY
H. A. SEIPEL
S.-Y. PAIK
M. J. WALTER
N. J. BORYS
J. M. LUPTON
C. BOEHME*		 https://www.nature.com Thermal Deposition
Spin Coating
 Screen Shot 2018-11-02 at 2.32.58 PM Chemical Sensors with Integrated Electronics Segyeong Joo
Richard B. Brown		 https://pubs.acs.org Deposition
 Capture A Multilayer MEMS Platform for Single Cell Electric Impedance Spectroscopy and        Electrochemical Analysis  Gregory M. Dittami
H. Edward Ayliffe
Curtis S. King
Richard D. Rabbitt		  https://ieeexplore.ieee.org DentonSputter
Wet Etch
Dry Etch
Lithography
 Capture

Transformed Gold Island Film Improves Light-to-Heat Transduction of Nanoparticles on Silica Capillaries

  Wonmi Ahn† and D. Keith Roper https://pubs.acs.org AFM
Deposition
Evaporation
 Capture  Electroless Gold Island Thin Films: Photoluminescence and Thermal Transformation to Nanoparticle Ensembles  Wonmi Ahn

Benjamin Taylor

Analı´a G. Dall’Ase´n

D. Keith Roper

  https://pubs.acs.org Deposition

Evaporation

Wet Etch
Screen Shot 2018-11-08 at 4.06.04 PM Stretchable Fingernail Sensors for Measurement of Fingertip Force Jumana M. Abu-Khalaf
Jung Woo Park
Debra J. Mascaro
Stephen A. Mascaro		 https://ieeexplore-ieee-org  Deposition
 Screen Shot 2018-11-08 at 4.25.59 PM

High temperature humidity sensors based on sputtered Y-doped BaZrO3thin films

XiaoXin Chena

Loren Rietha

Mark S. Millera

Florian Solzbacher

 https://www.sciencedirect.com Diffusion                        Deposition
XPS
Screen Shot 2018-11-08 at 4.30.55 PM Junction Field Effect Transistors for Nanoelectronics Justin B. Jackson
Divesh Kapoor
Mark S. Miller		  https://ieeexplore.ieee.org Deposition
 Screen Shot 2018-11-08 at 4.35.05 PM

Giant Magenetoresistive Sensors. 2. Detection of Biorecognition Events at Self-Referencing and Magnetically Tagged Arrays

Rachel L. Millen

John Nordling,

Heather A. Bullen

Marc D. Porter

 

 https://pubs.acs.org Deposition

Lithography
 Screen Shot 2018-11-09 at 3.23.15 PM

Circuit Simulation for Nano-Electro-Mechanical Switches VLSI Circuits

Khawla Alzoubi

Daniel G. Saab

 https://ieeexplore.ieee.org Lithography
 Screen Shot 2018-11-09 at 4.39.15 PM

Field Emission in Air between Iridium-Iridium Oxide Diode Tips

Scott Brimley,

Mark S. Miller

Mark Hagmann

 https://ieeexplore.ieee.org Sputtering

Wet Etch

EBL
 Screen Shot 2018-11-09 at 4.51.42 PM

Terahertz Backward-Wave Oscillator Slow-Wave Circuits

 Guillermo A.
Oviedo Vela
Mark S. Miller
Richard W. Grow		 https://ieeexplore-ieee-org Dry Etch
Screen Shot 2018-11-12 at 3.10.38 PM High speed wafer scale bulge testing for the determination of thin film mechanical properties M. P. Orthner
L. W. Rieth
F. Solzbacher		 https://aip.scitation.org LPCVD
Sputtering
Wet Etching
 Screen Shot 2018-11-12 at 3.24.47 PM

1 VOLT, 1 GHz NEMS SWITCHES

M. Tabib-Azar,

S.R. Venumbaka

K. Alzoubi

D. Saab

 https://ieeexplore-ieee-org ALD
 Screen Shot 2018-11-12 at 3.32.09 PM

ULTRA-LOW POWER ULTRA-FAST HYBRID CNEMS-CMOS FPGAs

VIJAY KRISHNA SIRIGIRI

 https://etd.ohiolink.edu LPCVD

Dry Etching
 Screen Shot 2018-11-12 at 3.35.10 PM

Novel MEMS 900 MHz Electrostatic Silicon Delay Line

Massood Tabib-Azar

Khawla Alzoubi

Daniel Saab

 https://ieeexplore-ieee-org ALD

LPCVD

Etching