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Surface Analysis and nano-scale Imaging (co-located MRSEC shared facilities)

• JEOL JEM-2800 S/TEM with ultrafast EDS, 3D tomo
• FEI Helios Nanolab 650i hi-res dbFIB, Nabity EBL

Pt, W, C dep; XeF2, I2, H2O enhanced etch

• FEI Quanta 600 FE-ESEM w/ EDS, EBSD, particle ID
• Kratos AxisUltra imaging XPS / Auger / ISS
• EDAX Eagle III Microspot XRF (µprobe & mapping)
• Bruker ICON-PT AFM: PF-QNM, wet cell, MFM, KPFM
• Woollam V-VASE spectroscopic ellipsometer
• ZYGO NewView 5032 optical profilometer
• Keyence VHX-5000 3D (& contact angle goniometer)
• Micro fiducial laser cutter for correlative multiscale

microscopy: 355, 532, 1064 nm; 1.2-15mJ

• Vertex 220 microVu Digital Comparator
• SEM/TEM prep tool suite, manual and ion polishing