Tool Owner
Joseph Jacob (joseph.jacob@utah.edu)
Reservations Calendar
The Agilis MOCVD system is a Chemical Vapor Delivery system that uses Metal-Organic precursors to grow films using fully automated recipes. The primary material grown is Gallium Oxide (Ga2O3). Samples/substrates up to 2″ diameter can be used.
Run-Data Reports for Agnitron Imperium GaO
| Processes on Agnitron Imperium GaO |
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