Tool Owner
Brian Baker (bbaker@eng.utah.edu)
Walk-up Tool (no reservation needed)
S/N: 2022306
All tests were spun for 45 seconds at the labeled rpm. The thickness was tested on the N&K and confirmed on the Tencor.
Download Files
Files
Files:
Photresist:
Shipley 1813 Positive Photoresist
Run-Data Reports for CEE 200X 1800 Spinner
| Processes on CEE 200X 1800 Spinner | ||||
|---|---|---|---|---|
| aborted | ||||
| service | ||||
| Spinner | ||||
| runs-without-data | ||||
| Download Combined Report (XLS) |