Tool Owner
Brian Baker (bbaker@eng.utah.edu)
Reservations Calendar
S/N: 0522 420 09
- Front and backside alignment
- 4″ and 5″ masks
- Illumination wavelength between 350nm-450nm
- Alignment resolution of 1 um frontside, and 2 um backside
Download Files
Files
SOP:
Staff Files
Manual:
SOP:
Run-Data Reports for EV 420
| Processes on EV 420 | ||||
|---|---|---|---|---|
| aborted | ||||
| lab-use | ||||
| service | ||||
| standard-logs | ||||
| runs-without-data | ||||
| Download Combined Report (XLS) |