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Surface Analysis and nano-scale Imaging (co-located MRSEC shared facilities)
- JEOL JEM-2800 S/TEM with ultrafast EDS, 3D tomo
- FEI Helios Nanolab 650i hi-res dbFIB, Nabity EBL
Pt, W, C dep; XeF2, I2, H2O enhanced etch
- FEI Quanta 600 FE-ESEM w/ EDS, EBSD, particle ID
- Kratos AxisUltra imaging XPS / Auger / ISS
- EDAX Eagle III Microspot XRF (µprobe & mapping)
- Bruker ICON-PT AFM: PF-QNM, wet cell, MFM, KPFM
- Woollam V-VASE spectroscopic ellipsometer
- ZYGO NewView 5032 optical profilometer
- Keyence VHX-5000 3D (& contact angle goniometer)
- Micro fiducial laser cutter for correlative multiscale
microscopy: 355, 532, 1064 nm; 1.2-15mJ
- Vertex 220 microVu Digital Comparator
- SEM/TEM prep tool suite, manual and ion polishing
Cleanroom
DESIGN & SIMULATION SOFTWARE
- L-Edit, Cadence, AutoCAD
- Link-CAD DXF/GDSII/CIF/PG/EM conversion tools
- SASS JMP statistical design of experiments (CADE)
- ANSYS & COMSOL finite element analysis
LITHOGRAPHY
Pattern Generation
- Heidelberg µPG 101 Laser Pattern Generator (x2)
- 1µm, 2.5 µm, 5µm write heads
- 900nm direct write and grayscale patterning
Pattern Transfer
- EVG EV-420 front and backside mask aligner
- Suss MA1006 contact aligner
- OAI Model 200 contact aligner (x2)
- Spinners, ovens, hot plates, hoods, SRDs, …
- LOR 7B, AZ 9620, Shipley 1813, nLOF 2020
- YES HMDS vapor prime vacuum ovens
THIN FILM DEPOSITION
Sputtering:
- TMV SS-40C: 8 dedicated cathodes, dual cryo-pumped
- Denton Discovery 18: 3 user config 3” cathodes, RF/DC
- Denton 635LL: 3-cat, OES, RGA feedback reactive sputter
Metals/Alloys: Ag, Al, Al/Si, Au, C, Chromel, Co, Cr, Cu, Cu/Ag, Ge, Ir, Fe, Ni, NiCr, NiCrFe, Nb, Pd, Pt, Si (p-type), Ta, Ti, TiW, V, W
Oxides / Ceramics: Al2O3, SiO2 ITO, BN, CeSm(ox), LaSrFe(ox),
NaMnO3, NdMgO, SiC, Si3N4, TaO2, TiO2, YNiZrO, YSZ, ZnO
Evaporation: Al, Ag, Au, Au/Ge, Cr, Cu, Mg, Mo, NiCr, Ni, Ta, Ti
- Denton e-beam DV-SJ/20C with 4 hearths, user config
- CHA 600 e-beam (Al, Mg)
- CVC SC-5000 e-beam (pending, organic)
PECVD
- Oxford Plasmalab 80+: α-Si, Si3N4, SiONx, SiO2
CVD
- SCS PDS 2010 Parylene-C
ALD
- Cambridge Fiji F200 w/ thermal & plasma dep modes, H2O plasma (Pt, HfO2, ZnO, Al2O3, SiO2,, TiO2, MgO, ZrO2, WO3, AlN)
FURNACES and DIFFUSION
LPCVD
- Expertech TEOS / LTO / PSG / low-stress Si3N4, α & phos-polySi
Atmospheric and Rapid Annealing
- Blue-M box furnace with N2 purge
- ProTemp wet/dry oxidation with DCE
- Allwin 610 RTP/RTA with O2, N2, Ar, H2 forming gas, 200-1250C
ETCH
RIE and DRIE
- STS Aspect ICP DRIE: time-multiplex Si etch (anti-footing)
- Oxford Plasmalab 100+ ICP time-multiplex & cryo DRIE SF6, CF4, CHF3, O2, Ar, Cl2, HBr, N2
- Oxford Plasmalab 80+ multipurpose (SF6, CF4, O2, Ar)
- Technics PEII H2O, O2 descum & resist strip
- Xactix Xetch XeF2 silicon isotropic etch
Wet Chemical
- Bold & WAFAB wet benches (x6) acids, bases, organics
- Au etch station
MICROMACHINING
- Optec Micromaster KrF laser polymer machining
- Reel-Tech LM4000 Nd-YAG laser micromachining
- Custom KOH bulk Si etch station
- Cu & Ni electroplating station
POLISHING/PLANARIZATION
- Strasbaugh 6EC 100 mm CMP (Si, SiO2)
PACKAGING & PROTOTYPING
- EVG 520IS wafer bonder (hot embossing, thermal & anodic)
- Disco DAD 641 & Disco 3220 dicing saws (std or UV tape)
- MEI wedge wirebonder with Au and Al wire
- UTI 9101 wire bond pull tester
- Laserstar 1900 micro laser welder (1064nm 150J)
- Viteris Technologies Precision Microwire EDM
- Omnicure 1000 UV curing (320-500nm)
MICROFLUIDICS PROTOTYPING
- PDMS precision dispensing & lamination press
- Corona discharge UV/O3 plasma treatment
- CEE Spinner/Coater Glove Box and Vacuum Oven Suite
- CO2 Laser (dual laser cartridge, 10W and 75W)
TEST AND CHARACTERIZATION Cleanroom Metrology
- Keyence VHX-5000 3D microscope
- LEO 440 SEM
- n&k NKT 1500 thin film analyzer
- Nanometrics NanoSpec 3000 film thickness
- Magnetron Instruments 4-point probe
- Polyvar Met with DIC + many optical microscopes
- Nikon V12A optical comparator
- Infinivar Infiniprobe
- Tencor P-10 and P-20 stylus profilometers
- Tencor Flexus 2320 film stress
ELECTRICAL / MAGNETIC TESTING LABS
- Verigy 9300 SOC IC tester
- Microsense FCM-10 vibrating magnetometer (VSM)
- Keysight 404A Mixed Signal O-scope
- Keysight E5061B Network Analyzer (pending)
- Keithley 4200 parameter analyzer with 4 SMUs
- Probe stations
STAFF SERVICES
- Equipment Installation, Diagnostics, and Repair
- Alcatel ASM 180TD dry-pumped leak detecto
- Professional Technical Support
- Design of Experiments (DOE)
- R&D Process Development
- Thin Film Deposition and Patterning
Center for Engineering Innovation www.cei.utah.edu- Engineering design services
- (Bio)MEMS design and fabrication
- Advanced package development