Tool Owner
Brian Baker (bbaker@eng.utah.edu)
S/N: 2051061
- Accepts up to 6″ wafers
- programable:
- 10 programs
- each with up to 10 steps including: Acceleration, Speed, Time
Download Files
Files
Lift Off Resist:
Negative Lift Off Resist AZ NLOF 2020 Spec Sheet
Positive Lift Off Resist LOR10B Spec Sheet 1
Positive Lift Off Resist LOR10B Spec Sheet 2
Photoresist:
Shipley 1813 Positive Photoresist
Processes:
SOP:
Staff Files
Manuals:
Run-Data Reports for CEE 100
| Processes on CEE 100 |
|---|