Tool Owner

Jim Pierce (jim.pierce@utah.edu)

Reservations Calendar

S/N: 0498-4669

• Measures the changes in the radius of curvature of a substrate created by deposition of a stressed thin film on its surface
• Measures elastic constant and thermal expansion coefficient of a thin film if the thickness of the film and the substrate are known
• Substrate size: 3-8″ round (75mm-200mm)
• Operating Temp: room 500C
• Substrate surface must be able to reflect a laser beam
• 3-d mapping options
• Automated stress calculation
• Laser: 4-mW GaAlAs laser with wavelength 670nm and 4-mW GaAlAs laser with wavelength 780nm

Download Files

Files

Spec Sheet:

Film stress Tencor FLX2320 Spec Sheet.pdf

Staff Files

Manual:

Tencor Flexus 2320 User Manual

Formatting Flash Drive for Tencor