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    • Become a member and get access to the cleanroom

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    • Equipment Links

    • Fabrication Procedures

      • Photolithography Spin/Bake/Expose/Develop

        • +S1813 Photoresist

        • nLOF 2020 Photoresist

        • LOR 10B Photoresist

        • AZ 9260 Photoresist

  • EM Surface Analysis Lab

    • Get Access to the Electron Micrsocopy and Surface Analysis Lab

    • Request EMSAL staff to analyze a sample for you

    • Capabilities

    • Staff Consultation

    • On-Campus Rates

    • Industry Rates

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    • Nanoscribe Photonic Pro GT2 Micro 3D Printing Service (2 Photon Polymerization)

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    • Wafer Dicing and Anodic Bonding

    • Custom Biochip Fabrication (microfluidic channels, neural probes, microneedles)

    • Micro/Nano Imaging (Optical and SEM Videos and Microphotographs)

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Profilometer Tencor P-10

December 12, 2022

Tool Owner

Joseph Jacob (joseph.jacob@utah.edu)

Walk-up (no reservation needed)

S/N: 12980445

  • Submicron film thickness
  • Surface roughness measurements
  • 4″ Wafer surface profiler with step height and bow measurement capability

Download Files

Files

SOP:

Tencor SOP in PDF Format

Software:

USB as Floppy Disk on Windows

Spec Sheet:

Spec Sheet Tencor P-10.pdf

Staff Files

Manual:

Tencor Service Manual.pdf

SOP:

Tencor SOP in Word Format

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