Tool Owner

Brian Baker (bbaker@eng.utah.edu)

Reservations Calendar

S/N: 06060026

• Top and Bottom Side alignment
• One can expose in all common printing modes using collimated light optics
• Can be used in all major lithography areas:
  • M(O)EMS
  • Bulk MEMS
  • Optoelectronics with more coarse features
  • Power devices
  • Bumping
  • Etc.
• Equipped with a programmable control unit
• Alignment is carried out by means of micro-meter screws
  • Z-axis is motorized
• Fitted with a calotte chuck wedge error compensation system
• Top side alignment
  • Equipped with a splitfield microscope
  • CCD and monitor
• Supports 5″ and 7″ masks

Meausured linewidths (Shipley 1813, 2000 rpm 60 sec spin, 110 C 60 sec hotplate bake, 30 mJ/cm² exposure dose, AZ 1:1 35 sec)

Minimum measured linewitdth at full photoresist height: 2 um

Download Files

Files

Process Characterization:

Suss Aligner Specs and Brochure

Photoresist Re-hydration

Suss Aligner Characterization July 2015

SOP:

Suss MA1006 Aligner SOP

Staff Files

Manual:

Manual 1.1e

Pneumatics

Suss Aligner Manual

Suss Aligner Power Supply Manual

Suss Lamp Power Supply

SOP:

Suss MA1006 Aligner SOP Word Format (1)