MENU
  • Cleanroom

    • Equipment & Capabilities

    • Become a member and get access to the cleanroom

    • Service Request

    • Staff Consultation

    • Rates

    • PDF Equipment List

    • Equipment Links

    • Fabrication Procedures

      • Photolithography Spin/Bake/Expose/Develop

        • +S1813 Photoresist

        • nLOF 2020 Photoresist

        • LOR 10B Photoresist

        • AZ 9260 Photoresist

  • EM Surface Analysis Lab

    • Get Access to the Electron Micrsocopy and Surface Analysis Lab

    • Request EMSAL staff to analyze a sample for you

    • Capabilities

    • Staff Consultation

    • On-Campus Rates

    • Industry Rates

  • Services

    • Nanoscribe Photonic Pro GT2 Micro 3D Printing Service (2 Photon Polymerization)

    • Heidelberg DWL66+ Photomask Production and Direct Writing or Grayscale Lithography Service

    • Precious Metals Coating and Patterning (Gold, Platinum, Silver, Iridium, Palladium)

    • Wafer Dicing and Anodic Bonding

    • Custom Biochip Fabrication (microfluidic channels, neural probes, microneedles)

    • Micro/Nano Imaging (Optical and SEM Videos and Microphotographs)

    • WAFER OR THIN FILM ETCHING/PATTERNING: (DRIE, ICP RIE, XeF2 dry silicon isotropic etch, O2 plasma, or wet chemical )

    • If you are…

      • A Student

      • A Business

      • Interested in Nanotech

      • Preparing to Publish

  • Member Resources

    • Member Door Access Request Form

    • Request Equipment Training or Service

    • Equipment Pages

    • HSC Scheduling

    • Equipment Run Data (HSC)

    • Archived Equipment Run Data (Coral)

    • Design a Process

    • Preparing a Proposal (Seed fund application)

    • Cloud Storage

    • Lab User Guide

    • Safety

    • Lab Member Resources

    • Users in Lab

    • Emergency Contacts

    • New Material Request

    • Cleanroom Visitor Log

    • Staff Resources

  • Billing

    • Pay Invoice Online

    • Billing Rates

    • Cost Tracking

    • Cost Adjustment Request

  • About Us

    • Overview

    • Staff

    • Address and Phone

    • How to Get Here

    • Nanofab Parking

    • Need Help?

    • Acknowledgments

    • Brochure

    • Lab History

    • nanoUtah

    • Affiliated Labs

    • Publications

    • Cool Stuff

Utah Nanofab

The University of Utah

Utah Nanofab

  • Cleanroom

    • Equipment & Capabilities

    • Become a member and get access to the cleanroom

    • Service Request

    • Staff Consultation

    • Rates

    • PDF Equipment List

    • Equipment Links

    • Fabrication Procedures

      • Photolithography Spin/Bake/Expose/Develop

        • +S1813 Photoresist

        • nLOF 2020 Photoresist

        • LOR 10B Photoresist

        • AZ 9260 Photoresist

  • EM Surface Analysis Lab

    • Get Access to the Electron Micrsocopy and Surface Analysis Lab

    • Request EMSAL staff to analyze a sample for you

    • Capabilities

    • Staff Consultation

    • On-Campus Rates

    • Industry Rates

  • Services

    • Nanoscribe Photonic Pro GT2 Micro 3D Printing Service (2 Photon Polymerization)

    • Heidelberg DWL66+ Photomask Production and Direct Writing or Grayscale Lithography Service

    • Precious Metals Coating and Patterning (Gold, Platinum, Silver, Iridium, Palladium)

    • Wafer Dicing and Anodic Bonding

    • Custom Biochip Fabrication (microfluidic channels, neural probes, microneedles)

    • Micro/Nano Imaging (Optical and SEM Videos and Microphotographs)

    • WAFER OR THIN FILM ETCHING/PATTERNING: (DRIE, ICP RIE, XeF2 dry silicon isotropic etch, O2 plasma, or wet chemical )

    • If you are…

      • A Student

      • A Business

      • Interested in Nanotech

      • Preparing to Publish

  • Member Resources

    • Member Door Access Request Form

    • Request Equipment Training or Service

    • Equipment Pages

    • HSC Scheduling

    • Equipment Run Data (HSC)

    • Archived Equipment Run Data (Coral)

    • Design a Process

    • Preparing a Proposal (Seed fund application)

    • Cloud Storage

    • Lab User Guide

    • Safety

    • Lab Member Resources

    • Users in Lab

    • Emergency Contacts

    • New Material Request

    • Cleanroom Visitor Log

    • Staff Resources

  • Billing

    • Pay Invoice Online

    • Billing Rates

    • Cost Tracking

    • Cost Adjustment Request

  • About Us

    • Overview

    • Staff

    • Address and Phone

    • How to Get Here

    • Nanofab Parking

    • Need Help?

    • Acknowledgments

    • Brochure

    • Lab History

    • nanoUtah

    • Affiliated Labs

    • Publications

    • Cool Stuff

Keyence VHX-5000 Microscope

December 12, 2022

Tool Owner

Brian Baker (bbaker@eng.utah.edu)

Reservations Calendar

Download Files

Member Files

Files:

VHX Microscope Lens Catalog

VHX-5000 Brochure

Manuals :

100x-1000x Lens Manual

Function Guide

Function Guide Changing Lenses and Tilting

User Manual March 2015

Training Videos:

2D Stitching

3D Stitching

Calibrating the Unit

Creating a Depth Composition

How to Create and Measure on a 3D Image

How to Make XY Measurement on a Saved Image

How to Take an All-in-Focus Image and Make XY Measurements

Optimize Lighting

Split-Screen and Commenting

Stage Initialization

Staff Files

Manual:

Networking 1

Networking 2

Run-Data Reports for Keyence VHX-5000 Microscope

Processes on Keyence VHX-5000 Microscope

Download Combined Report (XLS)

QUICK LINKS
  • Students & Faculty

    • Proposal Writing Support

    • Courses

    • Publishing

    • Career Opportunities

  • Business

    • Business Gateway

  • News & Events

    • News Stories

    • Lab History

    • Calendar

    • Cool Stuff

    • nanoUtah



login

36 S. Wasatch Drive, SMBB Rm 2500
SLC UT 84112
801.587.0676

© 2025 The University of Utah